Constant frequency drive method for MEMS for improved failure detection

Szilard Jamborhazi, Marta Rencz

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have analyzed several automotive gyroscopes that failed during production or in vehicles. This paper discusses the analysis results and introduces a method for improved failure detection for automotive MEMS devices based on constant drive frequency. Exchanging the internal oscillation frequency of the integrated MEMS device by an external fixed frequency improves the failure detection capabilities. With our novel method we propose to reduce the complexity of the MEMS signal processing nevertheless enabling the detection of up to now undetectable slight changes of the MEMS structures. The performed electrical measurements and Finite Element Analysis simulation experiments are presented to demonstrate the feasibility of the proposed method.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015
EditorsGerold Schropfer, Francis Pressecq, Marta Rencz, Peter Schneider, Yoshio Mita, Benoit Charlot, Pascal Nouet
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479986255
DOIs
Publication statusPublished - Jul 16 2015
Event17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 - Montpellier, France
Duration: Apr 27 2015Apr 30 2015

Publication series

NameSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015

Other

Other17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015
CountryFrance
CityMontpellier
Period4/27/154/30/15

Keywords

  • Vibratory MEMS
  • constant frequency drive
  • failure detection
  • failure mechanisms
  • resonant frequency

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Electrical and Electronic Engineering

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  • Cite this

    Jamborhazi, S., & Rencz, M. (2015). Constant frequency drive method for MEMS for improved failure detection. In G. Schropfer, F. Pressecq, M. Rencz, P. Schneider, Y. Mita, B. Charlot, & P. Nouet (Eds.), Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 [7161038] (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DTIP.2015.7161038