The applicability of the PIXE method by varying the beam energy for in-depth analysis was investigated. The measurements were carried out on different Al samples containing Zn and Mg, annealed during different time periods. The Zn concentration profiles for samples with different annealing were determined up to 30 μm. The method has a relatively poor depth resolution but its advantages (non-destructive multi-elemental method, applicable for a wide range of elements) make it useful especially in connection with some other profiling methods.
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