Compositional analysis of HfxSiyO1-x-y thin films by medium energy ion scattering (MEIS) analysis

H. Kitano, S. Abo, M. Mizutani, J. Tsuchimoto, T. Lohner, J. Gyulai, F. Wakaya, M. Takai

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

HfxSiyO1-x-y layers with thicknesses of 2 and 10 nm were measured by medium energy ion scattering (MEIS) with a toroidal electrostatic analyzer (TEA), in which the yield of MEIS spectra was found to decrease with decreasing energy in contrast to conventional Rutherford backscattering spectrometry (RBS), due to the increase in neutralized particles. The HfxSiyO1-x-y spectra obtained by MEIS were corrected with a ratio of the simulated MEIS yield to measured yield for a virgin Si at each energy. The corrected HfxSiyO1-x-y spectra were analyzed and the compositions for 2 and 10 nm thick HfxSiyO1-x-y were obtained by MEIS. An interface layer was found to exist between the Si substrate and the HfxSiyO1-x-y layer.

Original languageEnglish
Pages (from-to)246-249
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume249
Issue number1-2 SPEC. ISS.
DOIs
Publication statusPublished - Aug 2006

Fingerprint

ion scattering
Scattering
Ions
Thin films
thin films
energy
Rutherford backscattering spectroscopy
Spectrometry
Electrostatics
analyzers
backscattering
Substrates
Chemical analysis
electrostatics
spectroscopy

Keywords

  • Compositional analysis
  • HfSiO
  • High-k
  • MEIS
  • TEA

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Compositional analysis of HfxSiyO1-x-y thin films by medium energy ion scattering (MEIS) analysis. / Kitano, H.; Abo, S.; Mizutani, M.; Tsuchimoto, J.; Lohner, T.; Gyulai, J.; Wakaya, F.; Takai, M.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 249, No. 1-2 SPEC. ISS., 08.2006, p. 246-249.

Research output: Contribution to journalArticle

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AU - Abo, S.

AU - Mizutani, M.

AU - Tsuchimoto, J.

AU - Lohner, T.

AU - Gyulai, J.

AU - Wakaya, F.

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