Complex electron heating in capacitive multi-frequency plasmas

Julian Schulze, Edmund Schungel, Aranka Derzsi, Ihor Korolov, Thomas Mussenbrock, Zoltan Donko

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Complex spatio-temporal electron heating dynamics are observed in kinetic simulations of geometrically symmetric low-pressure capacitive argon plasmas driven by multiple consecutive harmonics of 13.56 MHz. These dynamics are caused by an electrically induced asymmetry that leads to the self-excitation of plasma series resonance oscillations of the current. Such oscillations cause a nonsinusoidal movement of the boundary sheath edges and multiple phases of fast sheath expansions. These expansion phases lead to the generation of negative space charges that propagate into the bulk, where they affect the heating rate significantly and relax quickly.

Original languageEnglish
Article number6755454
Pages (from-to)2780-2781
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume42
Issue number10
DOIs
Publication statusPublished - Oct 1 2014

Keywords

  • Plasma sheaths
  • plasma simulation
  • plasma sources
  • plasmas.

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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