Comparison of the structures of evaporated and ion-implanted amorphous silicon samples

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8 Citations (Scopus)

Abstract

The experimental structure factors of evaporated and ion-implanted amorphous silicon have been modelled by reverse Monte Carlo modelling. A detailed comparison, in terms of the pair correlation function and the distribution (of the cosines) of bond angles, is reported here for the two materials. It is found that for an acceptable reproduction of the measured structure factors the evaporated models must contain more 'small' bond angles, of the order of 75°, than their necessary abundance in the implanted models.

Original languageEnglish
Pages (from-to)2617-2624
Number of pages8
JournalJournal of Physics Condensed Matter
Volume17
Issue number17
DOIs
Publication statusPublished - May 4 2005

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

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