Comparison of anisotropic etching and laser technologies applied in manufacturing of semitransparent monocrystalline solar cells

Eniko Bándy, Árpad Földváry, J. Mizsei

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the comparison of two technologies that could be used to manufacture semitransparent monocrystalline building integrated solar cells: laser cutting and anisotropic etching. Nd:YAG 1064 nm laser cut sidewalls are rough and contain molten residues, resulting in shunts across the through-holes. TMAH etched edges are uniform with smooth sidewalls. Carrier lifetime and Kelvin probe measurements were conducted to study the flaws occurring in the two technologies.

Original languageEnglish
Title of host publicationDTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Pages32-36
Number of pages5
Publication statusPublished - 2012
Event2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2012 - Cannes Cote d'Azur, France
Duration: Apr 25 2012Apr 27 2012

Other

Other2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2012
CountryFrance
CityCannes Cote d'Azur
Period4/25/124/27/12

Fingerprint

Anisotropic etching
Solar cells
Carrier lifetime
Lasers
Molten materials
Defects

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Bándy, E., Földváry, Á., & Mizsei, J. (2012). Comparison of anisotropic etching and laser technologies applied in manufacturing of semitransparent monocrystalline solar cells. In DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (pp. 32-36). [6235320]

Comparison of anisotropic etching and laser technologies applied in manufacturing of semitransparent monocrystalline solar cells. / Bándy, Eniko; Földváry, Árpad; Mizsei, J.

DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2012. p. 32-36 6235320.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bándy, E, Földváry, Á & Mizsei, J 2012, Comparison of anisotropic etching and laser technologies applied in manufacturing of semitransparent monocrystalline solar cells. in DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS., 6235320, pp. 32-36, 2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2012, Cannes Cote d'Azur, France, 4/25/12.
Bándy E, Földváry Á, Mizsei J. Comparison of anisotropic etching and laser technologies applied in manufacturing of semitransparent monocrystalline solar cells. In DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2012. p. 32-36. 6235320
Bándy, Eniko ; Földváry, Árpad ; Mizsei, J. / Comparison of anisotropic etching and laser technologies applied in manufacturing of semitransparent monocrystalline solar cells. DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2012. pp. 32-36
@inproceedings{da6e5d728f5a4921a4a522bd91fe6945,
title = "Comparison of anisotropic etching and laser technologies applied in manufacturing of semitransparent monocrystalline solar cells",
abstract = "This paper presents the comparison of two technologies that could be used to manufacture semitransparent monocrystalline building integrated solar cells: laser cutting and anisotropic etching. Nd:YAG 1064 nm laser cut sidewalls are rough and contain molten residues, resulting in shunts across the through-holes. TMAH etched edges are uniform with smooth sidewalls. Carrier lifetime and Kelvin probe measurements were conducted to study the flaws occurring in the two technologies.",
author = "Eniko B{\'a}ndy and {\'A}rpad F{\"o}ldv{\'a}ry and J. Mizsei",
year = "2012",
language = "English",
isbn = "9781467307857",
pages = "32--36",
booktitle = "DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS",

}

TY - GEN

T1 - Comparison of anisotropic etching and laser technologies applied in manufacturing of semitransparent monocrystalline solar cells

AU - Bándy, Eniko

AU - Földváry, Árpad

AU - Mizsei, J.

PY - 2012

Y1 - 2012

N2 - This paper presents the comparison of two technologies that could be used to manufacture semitransparent monocrystalline building integrated solar cells: laser cutting and anisotropic etching. Nd:YAG 1064 nm laser cut sidewalls are rough and contain molten residues, resulting in shunts across the through-holes. TMAH etched edges are uniform with smooth sidewalls. Carrier lifetime and Kelvin probe measurements were conducted to study the flaws occurring in the two technologies.

AB - This paper presents the comparison of two technologies that could be used to manufacture semitransparent monocrystalline building integrated solar cells: laser cutting and anisotropic etching. Nd:YAG 1064 nm laser cut sidewalls are rough and contain molten residues, resulting in shunts across the through-holes. TMAH etched edges are uniform with smooth sidewalls. Carrier lifetime and Kelvin probe measurements were conducted to study the flaws occurring in the two technologies.

UR - http://www.scopus.com/inward/record.url?scp=84864647673&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84864647673&partnerID=8YFLogxK

M3 - Conference contribution

SN - 9781467307857

SP - 32

EP - 36

BT - DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

ER -