Comparative study on grating fabrication in transparent materials by TWIN-LIBWE and ultrashort pulsed ablation techniques

C. Vass, Bálint Kiss, Roland Flender, Zoltán Felházi, Pierre Lorenz, Martin Ehrhardt, Klaus Zimmer

Research output: Contribution to journalArticle

Abstract

Two methods for micro-structuring of transparent dielectric were compared in this study: the two-beam interferometric laser-induced backside wet etching (TWIN-LIBWE) and the two beam in-terferometric ablation by ultrashort laser pulses. In TWIN-LIBWE we used the 4th harmonic of Nd:YAG laser (λ=266 nm, τFWHM=8 ns, fuence: 265-500 mJ/cm2), while a Ti:Sapphire-based femto-second system (λ=800 nm, τFWHM=30 fs, pulse energy: 600-900 μJ) was used for direct ablation. Fused silica, sapphire and glass were used as bulk targets, while Al2O3, Y2O3, HfO2 and ZrO2 thin films (thickness: 160-1000 nm) on fused silica substrates were used as transparent film targets. The incident angle of the interfering beams was adjusted to result in 1 μm period structures in both ar-rangements. The surface morphologies of gratings were studied by atomic force microscope (AFM). After the comparison of best quality gratings produced by both setup in each material, we cannot determined which is the universally optimal method. The grating quality depends on the target ma-terial, their thickness, and certainly on the laser parameter.

Original languageEnglish
Pages (from-to)38-42
Number of pages5
JournalJournal of Laser Micro Nanoengineering
Volume10
Issue number1
DOIs
Publication statusPublished - 2015

Fingerprint

transparence
Wet etching
Fused silica
Ablation
Full width at half maximum
Sapphire
ablation
Laser beams
etching
gratings
laser beams
Fabrication
fabrication
Lasers
sapphire
Ultrashort pulses
silicon dioxide
Surface morphology
Film thickness
Microscopes

Keywords

  • Grating fabrication
  • Transparent dielectric
  • TWIN-LIBWE
  • Two-beam interference
  • Ultra-short laser ablation

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Comparative study on grating fabrication in transparent materials by TWIN-LIBWE and ultrashort pulsed ablation techniques. / Vass, C.; Kiss, Bálint; Flender, Roland; Felházi, Zoltán; Lorenz, Pierre; Ehrhardt, Martin; Zimmer, Klaus.

In: Journal of Laser Micro Nanoengineering, Vol. 10, No. 1, 2015, p. 38-42.

Research output: Contribution to journalArticle

Vass, C. ; Kiss, Bálint ; Flender, Roland ; Felházi, Zoltán ; Lorenz, Pierre ; Ehrhardt, Martin ; Zimmer, Klaus. / Comparative study on grating fabrication in transparent materials by TWIN-LIBWE and ultrashort pulsed ablation techniques. In: Journal of Laser Micro Nanoengineering. 2015 ; Vol. 10, No. 1. pp. 38-42.
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