Comparative study on emitter sheet resistivity measurements for inline quality control

E. Rüland, P. Fath, T. Pavelka, A. Pap, K. Peter, J. Mizsei

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

With increasing degree of automation and throughput in latest crystalline Si solar cell manufacturing lines a quality control (QC) directly incorporated in the corresponding process equipment is of rising interest. The dominant QC parameter for the phosphorus diffusion step is the emitter sheet resistance normally measured based on manually drawn samples. In contrast, our aim was to develop and test measurement methods which can be directly incorporated in high volume diffusion equipment. Two contactless approaches have been studied, the Eddy Current technique and a newly developed system based on SPY (Surface-Photo-Voltage) probing. As reference measurement technique a four point probe FPP was used. As result it could be clearly shown that the novel SPV approach already included in a new 30MW cell line lead to the same accuracy as an off-line FPP whereas the Eddy current technique can not be applied.

Original languageEnglish
Title of host publicationProceedings of the 3rd World Conference on Photovoltaic Energy Conversion
EditorsK. Kurokawa, L.L. Kazmerski, B. McNeils, M. Yamaguchi, C. Wronski
Pages1085-1087
Number of pages3
VolumeB
Publication statusPublished - 2003
EventProceddings of the 3rd World Conference on Photovoltaic Energy Conversion - Osaka, Japan
Duration: May 11 2003May 18 2003

Other

OtherProceddings of the 3rd World Conference on Photovoltaic Energy Conversion
CountryJapan
CityOsaka
Period5/11/035/18/03

Fingerprint

Eddy currents
Quality control
Sheet resistance
Phosphorus
Solar cells
Automation
Cells
Throughput
Crystalline materials
Electric potential

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Rüland, E., Fath, P., Pavelka, T., Pap, A., Peter, K., & Mizsei, J. (2003). Comparative study on emitter sheet resistivity measurements for inline quality control. In K. Kurokawa, L. L. Kazmerski, B. McNeils, M. Yamaguchi, & C. Wronski (Eds.), Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion (Vol. B, pp. 1085-1087)

Comparative study on emitter sheet resistivity measurements for inline quality control. / Rüland, E.; Fath, P.; Pavelka, T.; Pap, A.; Peter, K.; Mizsei, J.

Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion. ed. / K. Kurokawa; L.L. Kazmerski; B. McNeils; M. Yamaguchi; C. Wronski. Vol. B 2003. p. 1085-1087.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rüland, E, Fath, P, Pavelka, T, Pap, A, Peter, K & Mizsei, J 2003, Comparative study on emitter sheet resistivity measurements for inline quality control. in K Kurokawa, LL Kazmerski, B McNeils, M Yamaguchi & C Wronski (eds), Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion. vol. B, pp. 1085-1087, Proceddings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 5/11/03.
Rüland E, Fath P, Pavelka T, Pap A, Peter K, Mizsei J. Comparative study on emitter sheet resistivity measurements for inline quality control. In Kurokawa K, Kazmerski LL, McNeils B, Yamaguchi M, Wronski C, editors, Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion. Vol. B. 2003. p. 1085-1087
Rüland, E. ; Fath, P. ; Pavelka, T. ; Pap, A. ; Peter, K. ; Mizsei, J. / Comparative study on emitter sheet resistivity measurements for inline quality control. Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion. editor / K. Kurokawa ; L.L. Kazmerski ; B. McNeils ; M. Yamaguchi ; C. Wronski. Vol. B 2003. pp. 1085-1087
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