Comparative study on emitter sheet resistivity measurements for inline quality control

E. Rüland, P. Fath, T. Pavelka, A. Pap, K. Peter, J. Mizsei

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

With increasing degree of automation and throughput in latest crystalline Si solar cell manufacturing lines a quality control (QC) directly incorporated in the corresponding process equipment is of rising interest. The dominant QC parameter for the phosphorus diffusion step is the emitter sheet resistance normally measured based on manually drawn samples. In contrast, our aim was to develop and test measurement methods which can be directly incorporated in high volume diffusion equipment. Two contactless approaches have been studied, the Eddy Current technique and a newly developed system based on SPY (Surface-Photo-Voltage) probing. As reference measurement technique a four point probe FPP was used. As result it could be clearly shown that the novel SPV approach already included in a new 30MW cell line lead to the same accuracy as an off-line FPP whereas the Eddy current technique can not be applied.

Original languageEnglish
Title of host publicationProceddings of the 3rd World Conference on Photovoltaic Energy Conversion
EditorsK. Kurokawa, L.L. Kazmerski, B. McNeils, M. Yamaguchi, C. Wronski
Pages1085-1087
Number of pages3
Publication statusPublished - Dec 1 2003
EventProceddings of the 3rd World Conference on Photovoltaic Energy Conversion - Osaka, Japan
Duration: May 11 2003May 18 2003

Publication series

NameProceedings of the 3rd World Conference on Photovoltaic Energy Conversion
VolumeB

Other

OtherProceddings of the 3rd World Conference on Photovoltaic Energy Conversion
CountryJapan
CityOsaka
Period5/11/035/18/03

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Rüland, E., Fath, P., Pavelka, T., Pap, A., Peter, K., & Mizsei, J. (2003). Comparative study on emitter sheet resistivity measurements for inline quality control. In K. Kurokawa, L. L. Kazmerski, B. McNeils, M. Yamaguchi, & C. Wronski (Eds.), Proceddings of the 3rd World Conference on Photovoltaic Energy Conversion (pp. 1085-1087). (Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion; Vol. B).