Commemoration of the 25th anniversary of Auger electron spectroscopy

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This paper is devoted to the commemoration of the discovery of Auger electron spectroscopy (AES) by Lawrence Harris, published in April 1967, and to the 10th anniversary of his death in 1982. AES became the basis of quantitative surface physics and chemistry. A brief review is given on the history of AES beginning with the Auger-effect (1923), and Auger emission in the secondary emission (Lander 1953). Some details on the discovery of Harris and on the pioneer works of Peria, Weber, Palmberg, Goldsztaub, Bishop, Gallon, Taylor, MacDonald et al are presented. In 1973 the Welch Medal was awarded to Harris. The developments of electron spectrometers (RFA, CMA, HSA, etc.) and the fundamental works of Seah, Cazaux, Bauer, Langeron, Jablonski, Prutton et al are reviewed. These lists, however, are arbitrary and far from being complete. Topics and problems of present AES research are briefly discussed including parameters of surface analysis (sensitivity, lateral and depth resolution, sampling depth, etc.) achieved by AES and SAM.

Original languageEnglish
Pages (from-to)311-313
Number of pages3
Issue number2-3
Publication statusPublished - Jan 1 1994


ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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