Coherence effects in Makyoh topography

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Makyoh topography is an optical tool for the flatness testing of specular surfaces, based on the defocused detection of a collimated light beam reflected from the tested surface. The reflection image is related to the relief pattern of the tested surface due to the focusing/defocusing action of the surface irregularities. The main application of the method is semiconductor technology. In this contribution, the effects of the coherence of the illumination on the Makyoh imaging is analyzed. It is shown that coherence effects are expected even for white-light illumination because of the small source size. Under optimum imaging conditions, coherence is manifested as diffraction patterns around isolated defects and at sample edges, and as speckle due to surface roughness. These phenomena are analyzed as a function of surface roughness, illumination coherency and wavelength, light source size and instrumental geometrical parameters. The findings are illustrated with experimental images of various semiconductor samples.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume8082
DOIs
Publication statusPublished - 2011
EventOptical Measurement Systems for Industrial Inspection VII - Munich, Germany
Duration: May 23 2011May 26 2011

Other

OtherOptical Measurement Systems for Industrial Inspection VII
CountryGermany
CityMunich
Period5/23/115/26/11

Fingerprint

Topography
topography
Illumination
Lighting
illumination
Surface Roughness
Light sources
Semiconductors
surface roughness
Surface roughness
Imaging
Semiconductor materials
Imaging techniques
defocusing
Flatness
Speckle
Irregularity
flatness
irregularities
light beams

Keywords

  • Coherence
  • Diffraction
  • Full-field characterization techniques
  • Makyoh topography
  • Speckle
  • Surface flatness
  • Surface morphology

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Riesz, F. (2011). Coherence effects in Makyoh topography. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 8082). [80822I] https://doi.org/10.1117/12.888968

Coherence effects in Makyoh topography. / Riesz, F.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8082 2011. 80822I.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Riesz, F 2011, Coherence effects in Makyoh topography. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 8082, 80822I, Optical Measurement Systems for Industrial Inspection VII, Munich, Germany, 5/23/11. https://doi.org/10.1117/12.888968
Riesz F. Coherence effects in Makyoh topography. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8082. 2011. 80822I https://doi.org/10.1117/12.888968
Riesz, F. / Coherence effects in Makyoh topography. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8082 2011.
@inproceedings{1fac34c15f034a92b3da471c99eaa17c,
title = "Coherence effects in Makyoh topography",
abstract = "Makyoh topography is an optical tool for the flatness testing of specular surfaces, based on the defocused detection of a collimated light beam reflected from the tested surface. The reflection image is related to the relief pattern of the tested surface due to the focusing/defocusing action of the surface irregularities. The main application of the method is semiconductor technology. In this contribution, the effects of the coherence of the illumination on the Makyoh imaging is analyzed. It is shown that coherence effects are expected even for white-light illumination because of the small source size. Under optimum imaging conditions, coherence is manifested as diffraction patterns around isolated defects and at sample edges, and as speckle due to surface roughness. These phenomena are analyzed as a function of surface roughness, illumination coherency and wavelength, light source size and instrumental geometrical parameters. The findings are illustrated with experimental images of various semiconductor samples.",
keywords = "Coherence, Diffraction, Full-field characterization techniques, Makyoh topography, Speckle, Surface flatness, Surface morphology",
author = "F. Riesz",
year = "2011",
doi = "10.1117/12.888968",
language = "English",
isbn = "9780819486783",
volume = "8082",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Coherence effects in Makyoh topography

AU - Riesz, F.

PY - 2011

Y1 - 2011

N2 - Makyoh topography is an optical tool for the flatness testing of specular surfaces, based on the defocused detection of a collimated light beam reflected from the tested surface. The reflection image is related to the relief pattern of the tested surface due to the focusing/defocusing action of the surface irregularities. The main application of the method is semiconductor technology. In this contribution, the effects of the coherence of the illumination on the Makyoh imaging is analyzed. It is shown that coherence effects are expected even for white-light illumination because of the small source size. Under optimum imaging conditions, coherence is manifested as diffraction patterns around isolated defects and at sample edges, and as speckle due to surface roughness. These phenomena are analyzed as a function of surface roughness, illumination coherency and wavelength, light source size and instrumental geometrical parameters. The findings are illustrated with experimental images of various semiconductor samples.

AB - Makyoh topography is an optical tool for the flatness testing of specular surfaces, based on the defocused detection of a collimated light beam reflected from the tested surface. The reflection image is related to the relief pattern of the tested surface due to the focusing/defocusing action of the surface irregularities. The main application of the method is semiconductor technology. In this contribution, the effects of the coherence of the illumination on the Makyoh imaging is analyzed. It is shown that coherence effects are expected even for white-light illumination because of the small source size. Under optimum imaging conditions, coherence is manifested as diffraction patterns around isolated defects and at sample edges, and as speckle due to surface roughness. These phenomena are analyzed as a function of surface roughness, illumination coherency and wavelength, light source size and instrumental geometrical parameters. The findings are illustrated with experimental images of various semiconductor samples.

KW - Coherence

KW - Diffraction

KW - Full-field characterization techniques

KW - Makyoh topography

KW - Speckle

KW - Surface flatness

KW - Surface morphology

UR - http://www.scopus.com/inward/record.url?scp=84861082169&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84861082169&partnerID=8YFLogxK

U2 - 10.1117/12.888968

DO - 10.1117/12.888968

M3 - Conference contribution

AN - SCOPUS:84861082169

SN - 9780819486783

VL - 8082

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -