Abstract
Makyoh topography is an optical tool for the flatness testing of specular surfaces, based on the defocused detection of a collimated light beam reflected from the tested surface. The reflection image is related to the relief pattern of the tested surface due to the focusing/defocusing action of the surface irregularities. The main application of the method is semiconductor technology. In this contribution, the effects of the coherence of the illumination on the Makyoh imaging is analyzed. It is shown that coherence effects are expected even for white-light illumination because of the small source size. Under optimum imaging conditions, coherence is manifested as diffraction patterns around isolated defects and at sample edges, and as speckle due to surface roughness. These phenomena are analyzed as a function of surface roughness, illumination coherency and wavelength, light source size and instrumental geometrical parameters. The findings are illustrated with experimental images of various semiconductor samples.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 8082 |
| DOIs | |
| Publication status | Published - 2011 |
| Event | Optical Measurement Systems for Industrial Inspection VII - Munich, Germany Duration: May 23 2011 → May 26 2011 |
Other
| Other | Optical Measurement Systems for Industrial Inspection VII |
|---|---|
| Country | Germany |
| City | Munich |
| Period | 5/23/11 → 5/26/11 |
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Keywords
- Coherence
- Diffraction
- Full-field characterization techniques
- Makyoh topography
- Speckle
- Surface flatness
- Surface morphology
ASJC Scopus subject areas
- Applied Mathematics
- Computer Science Applications
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
Cite this
Coherence effects in Makyoh topography. / Riesz, F.
Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8082 2011. 80822I.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Coherence effects in Makyoh topography
AU - Riesz, F.
PY - 2011
Y1 - 2011
N2 - Makyoh topography is an optical tool for the flatness testing of specular surfaces, based on the defocused detection of a collimated light beam reflected from the tested surface. The reflection image is related to the relief pattern of the tested surface due to the focusing/defocusing action of the surface irregularities. The main application of the method is semiconductor technology. In this contribution, the effects of the coherence of the illumination on the Makyoh imaging is analyzed. It is shown that coherence effects are expected even for white-light illumination because of the small source size. Under optimum imaging conditions, coherence is manifested as diffraction patterns around isolated defects and at sample edges, and as speckle due to surface roughness. These phenomena are analyzed as a function of surface roughness, illumination coherency and wavelength, light source size and instrumental geometrical parameters. The findings are illustrated with experimental images of various semiconductor samples.
AB - Makyoh topography is an optical tool for the flatness testing of specular surfaces, based on the defocused detection of a collimated light beam reflected from the tested surface. The reflection image is related to the relief pattern of the tested surface due to the focusing/defocusing action of the surface irregularities. The main application of the method is semiconductor technology. In this contribution, the effects of the coherence of the illumination on the Makyoh imaging is analyzed. It is shown that coherence effects are expected even for white-light illumination because of the small source size. Under optimum imaging conditions, coherence is manifested as diffraction patterns around isolated defects and at sample edges, and as speckle due to surface roughness. These phenomena are analyzed as a function of surface roughness, illumination coherency and wavelength, light source size and instrumental geometrical parameters. The findings are illustrated with experimental images of various semiconductor samples.
KW - Coherence
KW - Diffraction
KW - Full-field characterization techniques
KW - Makyoh topography
KW - Speckle
KW - Surface flatness
KW - Surface morphology
UR - http://www.scopus.com/inward/record.url?scp=84861082169&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84861082169&partnerID=8YFLogxK
U2 - 10.1117/12.888968
DO - 10.1117/12.888968
M3 - Conference contribution
AN - SCOPUS:84861082169
SN - 9780819486783
VL - 8082
BT - Proceedings of SPIE - The International Society for Optical Engineering
ER -