CO-sensor for domestic use based on high temperature stable Ga2O3 thin films

T. Schwebel, M. Fleischer, H. Meixner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Gas sensors based on high temperature operated metal oxides, like Ga2O3 thin films show promising properties in terms of reproducibility, longterm stability against interfering gases and low cross sensitivity to humidity. In this paper a surface modification of the Ga2O3 is presented which allows the setup of a sensor suitable for indoor CO monitoring. The modification based on Au-clusters on the Ga2O3 surface yields high sensitivity towards CO and a distinct reduction of the cross sensitivity towards organic solvents. With the specimens, a resistance change of approx. factor 4 to 100 ppm CO in wet air is attained. By employing catalytic filters of ceramic material, cross sensitivities to organic solvents are nearly complete eliminated.

Original languageEnglish
Title of host publicationInternational Conference on Solid-State Sensors and Actuators, Proceedings
PublisherIEEE
Pages547-550
Number of pages4
Volume1
Publication statusPublished - 1997
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA
Duration: Jun 16 1997Jun 19 1997

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)
CityChicago, IL, USA
Period6/16/976/19/97

Fingerprint

Organic solvents
Thin films
Sensors
Ceramic materials
Chemical sensors
Surface treatment
Atmospheric humidity
Temperature
Oxides
Monitoring
Air
Metals
Gases

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Schwebel, T., Fleischer, M., & Meixner, H. (1997). CO-sensor for domestic use based on high temperature stable Ga2O3 thin films. In International Conference on Solid-State Sensors and Actuators, Proceedings (Vol. 1, pp. 547-550). IEEE.

CO-sensor for domestic use based on high temperature stable Ga2O3 thin films. / Schwebel, T.; Fleischer, M.; Meixner, H.

International Conference on Solid-State Sensors and Actuators, Proceedings. Vol. 1 IEEE, 1997. p. 547-550.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Schwebel, T, Fleischer, M & Meixner, H 1997, CO-sensor for domestic use based on high temperature stable Ga2O3 thin films. in International Conference on Solid-State Sensors and Actuators, Proceedings. vol. 1, IEEE, pp. 547-550, Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), Chicago, IL, USA, 6/16/97.
Schwebel T, Fleischer M, Meixner H. CO-sensor for domestic use based on high temperature stable Ga2O3 thin films. In International Conference on Solid-State Sensors and Actuators, Proceedings. Vol. 1. IEEE. 1997. p. 547-550
Schwebel, T. ; Fleischer, M. ; Meixner, H. / CO-sensor for domestic use based on high temperature stable Ga2O3 thin films. International Conference on Solid-State Sensors and Actuators, Proceedings. Vol. 1 IEEE, 1997. pp. 547-550
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