CMOS integrated tactile sensor array by porous Si bulk micromachining

Mária Ádám, Tibor Mohácsy, Péter Jónás, Csaba Dücso, Éva Vázsonyi, István Bársony

Research output: Contribution to journalArticle

22 Citations (Scopus)


An integrated 8 × 8 element 3D force sensor array was developed for tactile sensing. The 300 × 300 μm2 sensors are formed from mono-crystalline silicon membranes with spacing of 700 μm. The signals of the individual transducers are read out line-by-line via an on-chip CMOS decoder. The porous silicon bulk micromachining was implemented as one of the final steps of the n-well CMOS compatible processing.

Original languageEnglish
Pages (from-to)192-195
Number of pages4
JournalSensors and Actuators, A: Physical
Issue number1
Publication statusPublished - Mar 10 2008



  • Bulk micromachining
  • CMOS compatible
  • Tactile sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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