Charging behaviour of MNOS structures with embedded Ge nanocrystals

Z. Horváth, Károly Zs Molnár, G. Molnár, Péter Basa, Tamás Jászi, A. Pap, Rita Lovassy, Péter Turmezei

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Charging behaviour of MNOS structures containing Ge nanocrytals embedded at the SiO 2/Si 3N 4 interface are studied by experiments and by calculating tunnelling probabilities of electrons and holes to the conductance or valence band of the nitride layer, respectively, for structures with and without nanocrystals. It is concluded that the optimal charging behaviour of MNOS structures without nanocrystals can be expected for an oxide thickness of 2-3 nm. The presence of semiconductor nanocrystals at the SiO 2/Si 3N 4 interface enhances strongly the tunnelling probability of electrons and holes for structures with thin oxide layers (2-3 nm) at low electric fields, but they do not influence the charging behaviour of structures at high electric fields. The results of calculations are in agreement with the experimental results obtained on MNOS structures with Ge nanocrystals.

Original languageEnglish
Pages (from-to)1370-1373
Number of pages4
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Volume9
Issue number6
DOIs
Publication statusPublished - Jun 2012

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metal-nitride-oxide-silicon
charging
nanocrystals
oxides
electric fields
nitrides
electrons
valence

Keywords

  • Ge nanocrystals
  • MNOS
  • Non-volatile memory
  • Silicon nitride
  • Tunnelling

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Charging behaviour of MNOS structures with embedded Ge nanocrystals. / Horváth, Z.; Molnár, Károly Zs; Molnár, G.; Basa, Péter; Jászi, Tamás; Pap, A.; Lovassy, Rita; Turmezei, Péter.

In: Physica Status Solidi (C) Current Topics in Solid State Physics, Vol. 9, No. 6, 06.2012, p. 1370-1373.

Research output: Contribution to journalArticle

Horváth, Z. ; Molnár, Károly Zs ; Molnár, G. ; Basa, Péter ; Jászi, Tamás ; Pap, A. ; Lovassy, Rita ; Turmezei, Péter. / Charging behaviour of MNOS structures with embedded Ge nanocrystals. In: Physica Status Solidi (C) Current Topics in Solid State Physics. 2012 ; Vol. 9, No. 6. pp. 1370-1373.
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