Characterization of damage structure in ion implanted SiC using high photon energy synchrotron ellipsometry

P. Petrik, Z. Zolnai, O. Polgar, M. Fried, Z. Betyak, E. Agocs, T. Lohner, C. Werner, M. Röppischer, C. Cobet

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2 Citations (Scopus)

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Chemical Compounds

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Physics & Astronomy