Characterization of an integrable single-crystalline 3-D tactile sensor

Gábor Vásárhelyi, Mária Ádám, Éva Vázsonyi, Zsolt Vízváry, Attila Kis, István Bársony, Csaba Dücsõ

Research output: Contribution to journalArticle

35 Citations (Scopus)


Porous-Si-micromachining technique was used for the formation of single-crystalline force-sensor elements, capable of resolving the three vector components of the loading force. Similar structures presented so far are created from deposited polycrystalline Si resistors embedded in multilayered SiO 2/Si 3N 4 membranes, using surface micromachining technique for a cavity formation. In this paper, the authors implanted four piezoresistors in an n-type-perforated membrane, having their reference pairs on the substrate in order to form four half bridges for the transduction of the mechanical stress. They successfully combined the HF-based porous-Si process with conventional doping and Al metallization, thereby offering the possibility of integration with readout and amplifying electronics. The 300 × 300 μm 2 membrane size allows for the formation of large tactile arrays using single-crystalline-sensing elements of superior mechanical properties. They used the finite-element method for modeling the stress distribution in the sensor, and verified the results with real measurements. Finally, they covered the sensors with different elastic silicon-rubber layers, and measured the sensor's altered properties. They used continuum mechanics to describe the behavior of the rubber layer.

Original languageEnglish
Article number1661573
Pages (from-to)928-934
Number of pages7
JournalIEEE Sensors Journal
Issue number4
Publication statusPublished - Aug 1 2006



  • Porous-Si micromachining
  • Tactile sensors
  • Three-dimensional (3-D) force sensors

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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