Characterization of an integrable single-crystalline 3-D tactile sensor

Gábor Vásárhelyi, M. Ádám, E. Vázsonyi, Zsolt Vízváry, Attila Kis, I. Bársony, C. Dücső

Research output: Contribution to journalArticle

32 Citations (Scopus)

Abstract

Porous-Si-micromachining technique was used for the formation of single-crystalline force-sensor elements, capable of resolving the three vector components of the loading force. Similar structures presented so far are created from deposited polycrystalline Si resistors embedded in multilayered SiO 2/Si 3N 4 membranes, using surface micromachining technique for a cavity formation. In this paper, the authors implanted four piezoresistors in an n-type-perforated membrane, having their reference pairs on the substrate in order to form four half bridges for the transduction of the mechanical stress. They successfully combined the HF-based porous-Si process with conventional doping and Al metallization, thereby offering the possibility of integration with readout and amplifying electronics. The 300 × 300 μm 2 membrane size allows for the formation of large tactile arrays using single-crystalline-sensing elements of superior mechanical properties. They used the finite-element method for modeling the stress distribution in the sensor, and verified the results with real measurements. Finally, they covered the sensors with different elastic silicon-rubber layers, and measured the sensor's altered properties. They used continuum mechanics to describe the behavior of the rubber layer.

Original languageEnglish
Article number1661573
Pages (from-to)928-934
Number of pages7
JournalIEEE Sensors Journal
Volume6
Issue number4
DOIs
Publication statusPublished - Aug 2006

Fingerprint

Crystalline materials
sensors
Sensors
micromachining
membranes
Membranes
rubber
Rubber
Surface micromachining
continuum mechanics
Continuum mechanics
Micromachining
Metallizing
resistors
Resistors
stress distribution
readout
Stress concentration
finite element method
Electronic equipment

Keywords

  • Porous-Si micromachining
  • Tactile sensors
  • Three-dimensional (3-D) force sensors

ASJC Scopus subject areas

  • Engineering(all)
  • Electrical and Electronic Engineering

Cite this

Characterization of an integrable single-crystalline 3-D tactile sensor. / Vásárhelyi, Gábor; Ádám, M.; Vázsonyi, E.; Vízváry, Zsolt; Kis, Attila; Bársony, I.; Dücső, C.

In: IEEE Sensors Journal, Vol. 6, No. 4, 1661573, 08.2006, p. 928-934.

Research output: Contribution to journalArticle

@article{9051255d81cc43a0966b9e5b66ed0307,
title = "Characterization of an integrable single-crystalline 3-D tactile sensor",
abstract = "Porous-Si-micromachining technique was used for the formation of single-crystalline force-sensor elements, capable of resolving the three vector components of the loading force. Similar structures presented so far are created from deposited polycrystalline Si resistors embedded in multilayered SiO 2/Si 3N 4 membranes, using surface micromachining technique for a cavity formation. In this paper, the authors implanted four piezoresistors in an n-type-perforated membrane, having their reference pairs on the substrate in order to form four half bridges for the transduction of the mechanical stress. They successfully combined the HF-based porous-Si process with conventional doping and Al metallization, thereby offering the possibility of integration with readout and amplifying electronics. The 300 × 300 μm 2 membrane size allows for the formation of large tactile arrays using single-crystalline-sensing elements of superior mechanical properties. They used the finite-element method for modeling the stress distribution in the sensor, and verified the results with real measurements. Finally, they covered the sensors with different elastic silicon-rubber layers, and measured the sensor's altered properties. They used continuum mechanics to describe the behavior of the rubber layer.",
keywords = "Porous-Si micromachining, Tactile sensors, Three-dimensional (3-D) force sensors",
author = "G{\'a}bor V{\'a}s{\'a}rhelyi and M. {\'A}d{\'a}m and E. V{\'a}zsonyi and Zsolt V{\'i}zv{\'a}ry and Attila Kis and I. B{\'a}rsony and C. D{\"u}cső",
year = "2006",
month = "8",
doi = "10.1109/JSEN.2006.877990",
language = "English",
volume = "6",
pages = "928--934",
journal = "IEEE Sensors Journal",
issn = "1530-437X",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "4",

}

TY - JOUR

T1 - Characterization of an integrable single-crystalline 3-D tactile sensor

AU - Vásárhelyi, Gábor

AU - Ádám, M.

AU - Vázsonyi, E.

AU - Vízváry, Zsolt

AU - Kis, Attila

AU - Bársony, I.

AU - Dücső, C.

PY - 2006/8

Y1 - 2006/8

N2 - Porous-Si-micromachining technique was used for the formation of single-crystalline force-sensor elements, capable of resolving the three vector components of the loading force. Similar structures presented so far are created from deposited polycrystalline Si resistors embedded in multilayered SiO 2/Si 3N 4 membranes, using surface micromachining technique for a cavity formation. In this paper, the authors implanted four piezoresistors in an n-type-perforated membrane, having their reference pairs on the substrate in order to form four half bridges for the transduction of the mechanical stress. They successfully combined the HF-based porous-Si process with conventional doping and Al metallization, thereby offering the possibility of integration with readout and amplifying electronics. The 300 × 300 μm 2 membrane size allows for the formation of large tactile arrays using single-crystalline-sensing elements of superior mechanical properties. They used the finite-element method for modeling the stress distribution in the sensor, and verified the results with real measurements. Finally, they covered the sensors with different elastic silicon-rubber layers, and measured the sensor's altered properties. They used continuum mechanics to describe the behavior of the rubber layer.

AB - Porous-Si-micromachining technique was used for the formation of single-crystalline force-sensor elements, capable of resolving the three vector components of the loading force. Similar structures presented so far are created from deposited polycrystalline Si resistors embedded in multilayered SiO 2/Si 3N 4 membranes, using surface micromachining technique for a cavity formation. In this paper, the authors implanted four piezoresistors in an n-type-perforated membrane, having their reference pairs on the substrate in order to form four half bridges for the transduction of the mechanical stress. They successfully combined the HF-based porous-Si process with conventional doping and Al metallization, thereby offering the possibility of integration with readout and amplifying electronics. The 300 × 300 μm 2 membrane size allows for the formation of large tactile arrays using single-crystalline-sensing elements of superior mechanical properties. They used the finite-element method for modeling the stress distribution in the sensor, and verified the results with real measurements. Finally, they covered the sensors with different elastic silicon-rubber layers, and measured the sensor's altered properties. They used continuum mechanics to describe the behavior of the rubber layer.

KW - Porous-Si micromachining

KW - Tactile sensors

KW - Three-dimensional (3-D) force sensors

UR - http://www.scopus.com/inward/record.url?scp=33746919059&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33746919059&partnerID=8YFLogxK

U2 - 10.1109/JSEN.2006.877990

DO - 10.1109/JSEN.2006.877990

M3 - Article

VL - 6

SP - 928

EP - 934

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

SN - 1530-437X

IS - 4

M1 - 1661573

ER -