Characterization of a new type of Cr/Ni multilayer structure with AES and TEM

A. Zalar, A. Barna, P. Barna, P. Panjan, S. Hofmann

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A new type of multilayer structure, composed of alternating Cr and Ni thin films with a thickness increasing from 15 to 200 nm in the direction from the surface to the smooth Si substrate and with a total thickness of 1.1 mm, was investigated with Auger sputter depth profiling and transmission electron microscopy (TEM). TEM investigations of a cross-sectioned Cr/Ni multilayer shoowed the fine grained column structure of individual thin films and the sharp interfaces between them. The usefulness of the new Cr/Ni multilayer structure in fundamental investigations is demonstrated with AES sputter depth profiling of the samples, using different ion sputtering parameters. Applying the sample rotation technique during AES depth profiling, a depth profile of an as-deposited Cr/Ni sample with sharp interfaces was obtained through the entire multilayer of thickness of 1.1 mm; the depth resolution was constant for sputtered depths between 40 and 100 nm and larger than 200 nm. The interface broadening in AES depth profiles of as-deposited Cr/Ni multilayers and of those annealed at 400°C was measured and the diffusion parameters of Cr and Ni were calculated.

Original languageEnglish
Pages (from-to)485-488
Number of pages4
JournalVacuum
Volume42
Issue number7
DOIs
Publication statusPublished - 1991

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laminates
Multilayers
Depth profiling
Transmission electron microscopy
transmission electron microscopy
Thin films
Sputtering
thin films
profiles
Ions
sputtering
Substrates
ions

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Characterization of a new type of Cr/Ni multilayer structure with AES and TEM. / Zalar, A.; Barna, A.; Barna, P.; Panjan, P.; Hofmann, S.

In: Vacuum, Vol. 42, No. 7, 1991, p. 485-488.

Research output: Contribution to journalArticle

Zalar, A. ; Barna, A. ; Barna, P. ; Panjan, P. ; Hofmann, S. / Characterization of a new type of Cr/Ni multilayer structure with AES and TEM. In: Vacuum. 1991 ; Vol. 42, No. 7. pp. 485-488.
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