Characteristics of the flowing afterglow of a surface-wave microwave discharge in a reactor loaded with a small diameter tube

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2 Citations (Scopus)

Abstract

Applying the flowing afterglow of an N2O2 surface-wave microwave discharge it is shown, that using 500–1000 sccm gas flow rates the afterglow can efficiently travel through a 4.5 mm polymer tube placed into the afterglow reactor, as well as simultaneously inside and around the tube. The afterglow along the reactor loaded with a 5 mm I.D. quartz tube is followed through the UV emission of NO(B) molecules created in the three-body re-association process of N- and O-atoms, and by modeling calculations. It is shown that by placing the tube into reactor the pressure and the density of species increase. Along the tube the absolute density of atoms decrease due to the pressure drop there, which can be controlled through the system's pumping efficiency.

Original languageEnglish
Article number1700028
JournalPlasma Processes and Polymers
Volume14
Issue number10
DOIs
Publication statusPublished - Oct 1 2017

Keywords

  • afterglow plasma processes
  • microwave discharges
  • modeling
  • optical emission spectroscopy

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Polymers and Plastics

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