Carbon nanotube synthesis on oxidized porous silicon

K. Kordás, A. E. Pap, J. Vähäkangas, A. Uusimäki, S. Leppävuori

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11 Citations (Scopus)


Carbon nanotubes were grown on thermally oxidized porous silicon by catalytic chemical vapor deposition from the mixture of ferrocene and xylene precursor. The growth rate of carbon nanotubes showed dependence on the oxidation extent of porous silicon. On pristine porous silicon surfaces, only poor nanotube growth was observed, whilst samples oxidized in air at 200, 400, 600 and 800 °C prior to the deposition process proved to be suitable substrates for carbon nanotube synthesis. Networks of carbon tubes with diameter of ∼40 and ∼10 nm observed on the surfaces of samples were investigated by electron microscopy and by energy dispersive X-ray analysis.

Original languageEnglish
Pages (from-to)1471-1475
Number of pages5
JournalApplied Surface Science
Issue number5
Publication statusPublished - Dec 15 2005


  • Carbon nanotubes
  • Catalytic chemical vapor deposition
  • Porous silicon

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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  • Cite this

    Kordás, K., Pap, A. E., Vähäkangas, J., Uusimäki, A., & Leppävuori, S. (2005). Carbon nanotube synthesis on oxidized porous silicon. Applied Surface Science, 252(5), 1471-1475.