Carbon - metal (Ni, Ti) nanocomposite films as protective coatings

Katarína Sedlácková, Róbert Grasin, G. Radnóczi

Research output: Chapter in Book/Report/Conference proceedingChapter

6 Citations (Scopus)

Abstract

Carbon - metal (Ni, Ti) nanocomposites were prepared by dc magnetron sputtering. The films were deposited at different deposition temperatures (25 - 800°C) on silicon (001) substrates covered with 300 nm thick siliconoxide. The input power of the magnetrons with Ni target was between 5 W and 25 W, and the magnetrons with Ti target between 10 W and 40 W. The input power of carbon target was 150 W. We found correlation between structural, electrical and mechanical properties of films, and developed the optimal structure of films for protective applications. Transmission electron microscopy and high resolution electron microscopy were used to determine the structure of films. The standard four probe technique was used for electrical measurements. The mechanical properties of films, e.g. hardness, modulus of elasticity were measured by nanoindentor. In both cases (C-Ni, C-Ti), the highest hardness (C-Ni ~ 11 GPa, C-Ti ~ 18 GPa) and highest modulus of elasticity (C-Ni ~ 114 GPa, C-Ti ~ 205 GPa) were obtained for the coating preparet at 200°C consisting of columnar (Ni3C and TiC) crystallites and 2 nm thin amorphous and graphite-like carbon matrix. The hardness of the coating is independent on the metal content but is influenced by the structure of thin carbon matrix.

Original languageEnglish
Title of host publicationNew Research on Nanocomposites
PublisherNova Science Publishers, Inc.
Pages223-246
Number of pages24
ISBN (Print)9781604567991
Publication statusPublished - 2008

Fingerprint

Nanocomposite films
Protective coatings
Carbon
Magnetrons
Metals
Hardness
Elastic moduli
Coatings
Mechanical properties
High resolution electron microscopy
Crystallites
Magnetron sputtering
Structural properties
Nanocomposites
Graphite
Electric properties
Transmission electron microscopy
Silicon
Substrates
Temperature

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Sedlácková, K., Grasin, R., & Radnóczi, G. (2008). Carbon - metal (Ni, Ti) nanocomposite films as protective coatings. In New Research on Nanocomposites (pp. 223-246). Nova Science Publishers, Inc..

Carbon - metal (Ni, Ti) nanocomposite films as protective coatings. / Sedlácková, Katarína; Grasin, Róbert; Radnóczi, G.

New Research on Nanocomposites. Nova Science Publishers, Inc., 2008. p. 223-246.

Research output: Chapter in Book/Report/Conference proceedingChapter

Sedlácková, K, Grasin, R & Radnóczi, G 2008, Carbon - metal (Ni, Ti) nanocomposite films as protective coatings. in New Research on Nanocomposites. Nova Science Publishers, Inc., pp. 223-246.
Sedlácková K, Grasin R, Radnóczi G. Carbon - metal (Ni, Ti) nanocomposite films as protective coatings. In New Research on Nanocomposites. Nova Science Publishers, Inc. 2008. p. 223-246
Sedlácková, Katarína ; Grasin, Róbert ; Radnóczi, G. / Carbon - metal (Ni, Ti) nanocomposite films as protective coatings. New Research on Nanocomposites. Nova Science Publishers, Inc., 2008. pp. 223-246
@inbook{0dd7220d8de2427faf955b7337e10cdd,
title = "Carbon - metal (Ni, Ti) nanocomposite films as protective coatings",
abstract = "Carbon - metal (Ni, Ti) nanocomposites were prepared by dc magnetron sputtering. The films were deposited at different deposition temperatures (25 - 800°C) on silicon (001) substrates covered with 300 nm thick siliconoxide. The input power of the magnetrons with Ni target was between 5 W and 25 W, and the magnetrons with Ti target between 10 W and 40 W. The input power of carbon target was 150 W. We found correlation between structural, electrical and mechanical properties of films, and developed the optimal structure of films for protective applications. Transmission electron microscopy and high resolution electron microscopy were used to determine the structure of films. The standard four probe technique was used for electrical measurements. The mechanical properties of films, e.g. hardness, modulus of elasticity were measured by nanoindentor. In both cases (C-Ni, C-Ti), the highest hardness (C-Ni ~ 11 GPa, C-Ti ~ 18 GPa) and highest modulus of elasticity (C-Ni ~ 114 GPa, C-Ti ~ 205 GPa) were obtained for the coating preparet at 200°C consisting of columnar (Ni3C and TiC) crystallites and 2 nm thin amorphous and graphite-like carbon matrix. The hardness of the coating is independent on the metal content but is influenced by the structure of thin carbon matrix.",
author = "Katar{\'i}na Sedl{\'a}ckov{\'a} and R{\'o}bert Grasin and G. Radn{\'o}czi",
year = "2008",
language = "English",
isbn = "9781604567991",
pages = "223--246",
booktitle = "New Research on Nanocomposites",
publisher = "Nova Science Publishers, Inc.",

}

TY - CHAP

T1 - Carbon - metal (Ni, Ti) nanocomposite films as protective coatings

AU - Sedlácková, Katarína

AU - Grasin, Róbert

AU - Radnóczi, G.

PY - 2008

Y1 - 2008

N2 - Carbon - metal (Ni, Ti) nanocomposites were prepared by dc magnetron sputtering. The films were deposited at different deposition temperatures (25 - 800°C) on silicon (001) substrates covered with 300 nm thick siliconoxide. The input power of the magnetrons with Ni target was between 5 W and 25 W, and the magnetrons with Ti target between 10 W and 40 W. The input power of carbon target was 150 W. We found correlation between structural, electrical and mechanical properties of films, and developed the optimal structure of films for protective applications. Transmission electron microscopy and high resolution electron microscopy were used to determine the structure of films. The standard four probe technique was used for electrical measurements. The mechanical properties of films, e.g. hardness, modulus of elasticity were measured by nanoindentor. In both cases (C-Ni, C-Ti), the highest hardness (C-Ni ~ 11 GPa, C-Ti ~ 18 GPa) and highest modulus of elasticity (C-Ni ~ 114 GPa, C-Ti ~ 205 GPa) were obtained for the coating preparet at 200°C consisting of columnar (Ni3C and TiC) crystallites and 2 nm thin amorphous and graphite-like carbon matrix. The hardness of the coating is independent on the metal content but is influenced by the structure of thin carbon matrix.

AB - Carbon - metal (Ni, Ti) nanocomposites were prepared by dc magnetron sputtering. The films were deposited at different deposition temperatures (25 - 800°C) on silicon (001) substrates covered with 300 nm thick siliconoxide. The input power of the magnetrons with Ni target was between 5 W and 25 W, and the magnetrons with Ti target between 10 W and 40 W. The input power of carbon target was 150 W. We found correlation between structural, electrical and mechanical properties of films, and developed the optimal structure of films for protective applications. Transmission electron microscopy and high resolution electron microscopy were used to determine the structure of films. The standard four probe technique was used for electrical measurements. The mechanical properties of films, e.g. hardness, modulus of elasticity were measured by nanoindentor. In both cases (C-Ni, C-Ti), the highest hardness (C-Ni ~ 11 GPa, C-Ti ~ 18 GPa) and highest modulus of elasticity (C-Ni ~ 114 GPa, C-Ti ~ 205 GPa) were obtained for the coating preparet at 200°C consisting of columnar (Ni3C and TiC) crystallites and 2 nm thin amorphous and graphite-like carbon matrix. The hardness of the coating is independent on the metal content but is influenced by the structure of thin carbon matrix.

UR - http://www.scopus.com/inward/record.url?scp=84870779080&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84870779080&partnerID=8YFLogxK

M3 - Chapter

SN - 9781604567991

SP - 223

EP - 246

BT - New Research on Nanocomposites

PB - Nova Science Publishers, Inc.

ER -