Calibration system for tactile measuring probes

Gy Hermann, I. Rudas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Information about procedures and equipment for the calibration of linear displacement probes are rare in the literature. The paper first discusses the key properties of published systems with nanometer resolution followed by the description of a new calibration system having 50 nanometer measuring uncertainty. The probe displacement is generated by a single-axis positioning stage driven by a stepping motor. The tip of the probe touches the backface of the flat mirror with flatness better than λ/100, attached to the stage, acting as the retroreflector of the plane mirror laser interferometer. Angular sensors are used to capture the angular deviation of the mirror at the measuring positions. The probe error is the difference between the output of the probe and the value measured by the laser interferometer. Finally the calibration uncertainty and measurement results discussed to show the systems performance.

Original languageEnglish
Title of host publicationSISY 2015 - IEEE 13th International Symposium on Intelligent Systems and Informatics, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages145-148
Number of pages4
ISBN (Print)9781467393881
DOIs
Publication statusPublished - Nov 10 2015
Event13th IEEE International Symposium on Intelligent Systems and Informatics, SISY 2015 - Subotica, Serbia
Duration: Sep 17 2015Sep 19 2015

Other

Other13th IEEE International Symposium on Intelligent Systems and Informatics, SISY 2015
CountrySerbia
CitySubotica
Period9/17/159/19/15

Fingerprint

Calibration
Interferometers
Mirrors
Laser mirrors
Stepping motors
Lasers
Sensors
Uncertainty

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Information Systems
  • Signal Processing

Cite this

Hermann, G., & Rudas, I. (2015). Calibration system for tactile measuring probes. In SISY 2015 - IEEE 13th International Symposium on Intelligent Systems and Informatics, Proceedings (pp. 145-148). [7325368] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SISY.2015.7325368

Calibration system for tactile measuring probes. / Hermann, Gy; Rudas, I.

SISY 2015 - IEEE 13th International Symposium on Intelligent Systems and Informatics, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2015. p. 145-148 7325368.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hermann, G & Rudas, I 2015, Calibration system for tactile measuring probes. in SISY 2015 - IEEE 13th International Symposium on Intelligent Systems and Informatics, Proceedings., 7325368, Institute of Electrical and Electronics Engineers Inc., pp. 145-148, 13th IEEE International Symposium on Intelligent Systems and Informatics, SISY 2015, Subotica, Serbia, 9/17/15. https://doi.org/10.1109/SISY.2015.7325368
Hermann G, Rudas I. Calibration system for tactile measuring probes. In SISY 2015 - IEEE 13th International Symposium on Intelligent Systems and Informatics, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2015. p. 145-148. 7325368 https://doi.org/10.1109/SISY.2015.7325368
Hermann, Gy ; Rudas, I. / Calibration system for tactile measuring probes. SISY 2015 - IEEE 13th International Symposium on Intelligent Systems and Informatics, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 145-148
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