Calibration of SIMS measurements by ion implantation

J. Gyulai, F. Pavlyak, I. Krafcsik, A. Solyom, P. Riedl, L. Bori

Research output: Contribution to journalArticle

Abstract

The paper reviews some joint results of the above institutions in quantitative SIMS (Secondary Ion Mass Spectrometry) analysis of implanted dopants. Quantification of the SIMS was achieved by implanting marker ions as standards prior to analysis. Feasibility of this technique was first demonstrated by Giber et al. (1982). Further considerations will be presented.

Original languageEnglish
Pages (from-to)81-86
Number of pages6
JournalPeriodica Polytechnica: Chemical Engineering
Volume34
Issue number1-3
Publication statusPublished - 1990

Fingerprint

Secondary ion mass spectrometry
Ion implantation
Calibration
Doping (additives)
Ions

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Gyulai, J., Pavlyak, F., Krafcsik, I., Solyom, A., Riedl, P., & Bori, L. (1990). Calibration of SIMS measurements by ion implantation. Periodica Polytechnica: Chemical Engineering, 34(1-3), 81-86.

Calibration of SIMS measurements by ion implantation. / Gyulai, J.; Pavlyak, F.; Krafcsik, I.; Solyom, A.; Riedl, P.; Bori, L.

In: Periodica Polytechnica: Chemical Engineering, Vol. 34, No. 1-3, 1990, p. 81-86.

Research output: Contribution to journalArticle

Gyulai, J, Pavlyak, F, Krafcsik, I, Solyom, A, Riedl, P & Bori, L 1990, 'Calibration of SIMS measurements by ion implantation', Periodica Polytechnica: Chemical Engineering, vol. 34, no. 1-3, pp. 81-86.
Gyulai J, Pavlyak F, Krafcsik I, Solyom A, Riedl P, Bori L. Calibration of SIMS measurements by ion implantation. Periodica Polytechnica: Chemical Engineering. 1990;34(1-3):81-86.
Gyulai, J. ; Pavlyak, F. ; Krafcsik, I. ; Solyom, A. ; Riedl, P. ; Bori, L. / Calibration of SIMS measurements by ion implantation. In: Periodica Polytechnica: Chemical Engineering. 1990 ; Vol. 34, No. 1-3. pp. 81-86.
@article{c7ecb4f1e5f146a8833902a368a8943d,
title = "Calibration of SIMS measurements by ion implantation",
abstract = "The paper reviews some joint results of the above institutions in quantitative SIMS (Secondary Ion Mass Spectrometry) analysis of implanted dopants. Quantification of the SIMS was achieved by implanting marker ions as standards prior to analysis. Feasibility of this technique was first demonstrated by Giber et al. (1982). Further considerations will be presented.",
author = "J. Gyulai and F. Pavlyak and I. Krafcsik and A. Solyom and P. Riedl and L. Bori",
year = "1990",
language = "English",
volume = "34",
pages = "81--86",
journal = "Periodica Polytechnica: Chemical Engineering",
issn = "0324-5853",
publisher = "Budapest University of Technology and Economics",
number = "1-3",

}

TY - JOUR

T1 - Calibration of SIMS measurements by ion implantation

AU - Gyulai, J.

AU - Pavlyak, F.

AU - Krafcsik, I.

AU - Solyom, A.

AU - Riedl, P.

AU - Bori, L.

PY - 1990

Y1 - 1990

N2 - The paper reviews some joint results of the above institutions in quantitative SIMS (Secondary Ion Mass Spectrometry) analysis of implanted dopants. Quantification of the SIMS was achieved by implanting marker ions as standards prior to analysis. Feasibility of this technique was first demonstrated by Giber et al. (1982). Further considerations will be presented.

AB - The paper reviews some joint results of the above institutions in quantitative SIMS (Secondary Ion Mass Spectrometry) analysis of implanted dopants. Quantification of the SIMS was achieved by implanting marker ions as standards prior to analysis. Feasibility of this technique was first demonstrated by Giber et al. (1982). Further considerations will be presented.

UR - http://www.scopus.com/inward/record.url?scp=0025568108&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0025568108&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0025568108

VL - 34

SP - 81

EP - 86

JO - Periodica Polytechnica: Chemical Engineering

JF - Periodica Polytechnica: Chemical Engineering

SN - 0324-5853

IS - 1-3

ER -