The paper reviews some joint results of the above institutions in quantitative SIMS (Secondary Ion Mass Spectrometry) analysis of implanted dopants. Quantification of the SIMS was achieved by implanting marker ions as standards prior to analysis. Feasibility of this technique was first demonstrated by Giber et al. (1982). Further considerations will be presented.
|Number of pages||6|
|Journal||Periodica Polytechnica Chemical Engineering|
|Publication status||Published - Jan 1 1990|
ASJC Scopus subject areas
- Chemical Engineering(all)