CAD tools and foundries to boost microsystems development

B. Courtois, J. M. Karam, M. Lubaszewski, V. Szekely, M. Rencz, K. Hofmann, M. Glesner

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

This paper deals with CAD, testing and manufacting of microsystems (microelectromechanical systems). Both existing tools and research areas are addressed. All through the paper, similarities between the present development of microsystems and the development of microelectronics decades ago are pointed out: the migration from point tools to CAD frameworks, testing, prototyping facilities, foundries/fabless business, intellectual property issues. Specific aspects such as thermal issues and testing are also addressed.

Original languageEnglish
Pages (from-to)242-253
Number of pages12
JournalMaterials Science and Engineering B
Volume51
Issue number1-3
DOIs
Publication statusPublished - Feb 27 1998

Keywords

  • CAD
  • Manufacturing
  • Microelectromechanical systems
  • Microsystems
  • Testing

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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