C-Ti nanocomposite thin films: Structure, mechanical and electrical properties

K. Sedláčková, T. Ujvári, R. Grasin, P. Lobotka, I. Bertóti, G. Radnóczi

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Carbon-titanium nanocomposite thin films were deposited by DC magnetron sputtering on oxidized silicon substrates in argon. The films were prepared at different deposition temperatures between 25 and 800 °C. Transmission electron microscopy was used to determine the structure of the films. All the C-Ti nanocomposites consisted of columnar TiC structure with average column width ∼10 and 20 nm and a thin carbon matrix. The thickness of the carbon matrix between adjacent TiC columns was ∼2-5 nm. Mechanical properties (hardness, reduced modulus) of C-Ti films showed a distinct variation depending on the deposition temperature. Films deposited at 200 °C had the highest hardness ∼18 GPa and the highest reduced modulus ∼205 GPa. Temperature dependence of the film resistance was measured between 80 and 330 K. C-Ti nanocomposites have a non-metallic conduction mechanism characterized by a negative temperature coefficient of resistivity (TCR). The most negative TCR was observed for films showing high hardness and reduced modulus of elasticity.

Original languageEnglish
Pages (from-to)214-216
Number of pages3
JournalVacuum
Volume82
Issue number2 SPEC. ISS.
DOIs
Publication statusPublished - Oct 29 2007

Fingerprint

Nanocomposite films
nanocomposites
Electric properties
electrical properties
mechanical properties
Thin films
Mechanical properties
thin films
Negative temperature coefficient
Carbon
hardness
Hardness
carbon
Nanocomposites
electrical resistivity
temperature
Argon
Silicon
coefficients
matrices

Keywords

  • Carbon nanocomposite
  • Hardness
  • Temperature dependence of resistivity
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

C-Ti nanocomposite thin films : Structure, mechanical and electrical properties. / Sedláčková, K.; Ujvári, T.; Grasin, R.; Lobotka, P.; Bertóti, I.; Radnóczi, G.

In: Vacuum, Vol. 82, No. 2 SPEC. ISS., 29.10.2007, p. 214-216.

Research output: Contribution to journalArticle

Sedláčková, K. ; Ujvári, T. ; Grasin, R. ; Lobotka, P. ; Bertóti, I. ; Radnóczi, G. / C-Ti nanocomposite thin films : Structure, mechanical and electrical properties. In: Vacuum. 2007 ; Vol. 82, No. 2 SPEC. ISS. pp. 214-216.
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