Burgers vector types and the dislocation structures in sputter-deposited Cu-Nb multilayers

Gábor Csiszár, Amit Misra, Tamás Ungár

Research output: Contribution to journalArticle

14 Citations (Scopus)


The dislocation density and the Burgers vector population are determined within the Cu and Nb layers in highly textured sputter-deposited Cu-Nb multilayers by X-ray line profile analysis. The measurements are conducted with films on and off the substrates and by orienting the films in the Eulerian cradle for acquiring the hkl reflections corresponding to planes of the major texture component. The analysis reveals a nearly constant total dislocation density in the Cu layers in all the samples measured where the layer thickness varies from 20. nm to 75. nm, whereas in the Nb layers the dislocation density decreases slightly with increasing layer thickness. The overwhelming majority of the prevailing Burgers vectors of dislocations are oriented parallel to the interface planes of the multilayers.

Original languageEnglish
Pages (from-to)6887-6895
Number of pages9
JournalMaterials Science and Engineering A
Issue number22-23
Publication statusPublished - Aug 25 2011


  • Burgers vectors
  • Dislocations
  • Line profile analysis
  • Multilayers

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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