Brillouin light scattering from porous silicon films and multilayers

G. T. Andrews, A. M. Polomska, E. Vazsonyi, J. Volk

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Porous silicon films and multilayers were studied using Brillouin spectroscopy. Acoustic wave velocities and elastic constants were determined for films with porosity ∼0.60 formed from p -, p + and n + crystalline silicon. The velocities and elastic constants depend on the pore/crystallite geometry and morphology. Porous silicon multilayers were fabricated from (100) p + crystalline silicon. For a multilayer with 250 nm layer thickness and layer porosity sequence of 0.45/0.65/0.45/0.65/0.45, the Rayleigh surface phonon velocity was found to be 2850 m/s. The origin(s) of other peaks in the multilayer spectra are unknown but it is unlikely that they are surface modes because their shift(s) are independent of incident angle.

Original languageEnglish
Pages (from-to)1372-1377
Number of pages6
JournalPhysica Status Solidi (A) Applications and Materials Science
Volume204
Issue number5
DOIs
Publication statusPublished - May 1 2007

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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