Blind tracing of mechanical movement in electrostatic MEMS structures

V. Székely, P. G. Szabó

Research output: Contribution to journalArticle


Electrostatically driven micromechanical structures are an interesting and frequently used category of MEMS elements. Investigation of their properties is important both for better understanding the device operation and for fault detection and diagnosis. To follow the movement of micro-parts in such elements involves difficulties since device packages inhibit looking into the chip. Our motivation is to develop methods for tracing the movement of MEMS parts without optical inspection. This "blind" tracing seems to be possible by the recording and analysis of the charging/discharging current of the electrostatic actuator.

Original languageEnglish
Pages (from-to)11-20
Number of pages10
JournalAnalog Integrated Circuits and Signal Processing
Issue number1
Publication statusPublished - Apr 1 2012


  • Charging/discharging current
  • Electrostatic MEMS
  • Movement trace

ASJC Scopus subject areas

  • Signal Processing
  • Hardware and Architecture
  • Surfaces, Coatings and Films

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