Blind tracing of mechanical movement in electrostatic MEMS structures

V. Székely, P. G. Szabó

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Electro-statically driven micro-mechanical structures are an interesting and frequently used category of MEMS elements. Investigation of their properties is important both for better understanding the device operation and for fault detection and diagnosis. To follow the movement of micro-parts in such elements involves difficulties since device packages inhibit looking into the chip. Our motivation is to develop methods for tracing the movement of MEMS parts without optical inspection. This "blind" tracing seems to be possible by the recording and analysis of the charging/discharging current of the electro-static actuator.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Pages39-43
Number of pages5
Publication statusPublished - Oct 18 2010
EventSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 - Seville, Spain
Duration: May 5 2010May 7 2010

Publication series

NameSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Other

OtherSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
CountrySpain
CitySeville
Period5/5/105/7/10

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Székely, V., & Szabó, P. G. (2010). Blind tracing of mechanical movement in electrostatic MEMS structures. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 (pp. 39-43). [5486504] (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010).