Bilayer Cr/Au contacts on n-GaN

L. Dobos, L. Tóth, B. Pécz, Z. Horváth, Z. Horváth, A. Tóth, B. Beaumont, Z. Bougrioua

Research output: Contribution to journalArticle

Abstract

Cr/Au (40/65 nm) metal layers have been deposited by thermal evaporation onto n-GaN epitaxial layers grown by metal-organic chemical-vapour deposition (MOCVD) on a sapphire substrate. The samples have been annealed at 400, 700 and 900 °C for 10 min in vacuum. Techniques of TEM, EDS, HRTEM, FESEM, XRD and I-V characteristics have been used to characterize the micro-, and nanostructure, morphology, composition and electrical properties of the contacts before and after annealing. A binary phase of Cr 3Ga 4 and Au 7Ga 2 were identified at the interface of the n-GaN/Cr/Au contacts after annealing in vacuum at 700 and 900 °C. Current-voltage characterizations showed that the as-deposited and annealed Cr/Au contacts are rectifying up to 600 °C. After heat treatment in vacuum at 700 °C and 900 °C the Cr/Au contacts were linear.

Original languageEnglish
Pages (from-to)769-772
Number of pages4
JournalVacuum
Volume86
Issue number6
DOIs
Publication statusPublished - Jan 27 2012

Fingerprint

electric contacts
Vacuum
vacuum
Metals
Annealing
Organic Chemicals
annealing
Thermal evaporation
Aluminum Oxide
Organic chemicals
Epitaxial layers
Sapphire
metalorganic chemical vapor deposition
Energy dispersive spectroscopy
Chemical vapor deposition
Nanostructures
sapphire
Electric properties
heat treatment
electrical properties

Keywords

  • Contacts
  • GaN
  • Solid phase reaction
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Instrumentation
  • Surfaces, Coatings and Films

Cite this

Bilayer Cr/Au contacts on n-GaN. / Dobos, L.; Tóth, L.; Pécz, B.; Horváth, Z.; Horváth, Z.; Tóth, A.; Beaumont, B.; Bougrioua, Z.

In: Vacuum, Vol. 86, No. 6, 27.01.2012, p. 769-772.

Research output: Contribution to journalArticle

Dobos, L. ; Tóth, L. ; Pécz, B. ; Horváth, Z. ; Horváth, Z. ; Tóth, A. ; Beaumont, B. ; Bougrioua, Z. / Bilayer Cr/Au contacts on n-GaN. In: Vacuum. 2012 ; Vol. 86, No. 6. pp. 769-772.
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AU - Pécz, B.

AU - Horváth, Z.

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AU - Tóth, A.

AU - Beaumont, B.

AU - Bougrioua, Z.

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