Backscattering spectra of medium energy electrons

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

Backscattering spectra of medium energy electrons (1-10 keV) are very important in Auger electron spectroscopy. Backscattered electrons compose the background and contribute to the excitation of Auger transitions. The N(E) backscattering spectra were determined by an Auger spectrometer with a CMA analyzer operated in DC mode using an isolation amplifier system. The N(E) backscattering spectra of electrons were studied on graphite, Si, stainless steel, Ge, Mo, W and Au in the 0.7-3 keV range. The backscattering spectra are presented. Our main results can be summarized as follows:- the backscattering coefficient rB was determined by integrating N(E) above 272 eV (effective for Auger excitation of low energy peaks); -rB is little affected by the primary energy Ep and strongly increasing with Z; - the elastic peak N(Ep) is decreasing with Ep and strongly increasing with Z; - the distribution N(E) exhibits a drastic change with Z, going from Fe to Si; - the percentage of elastically reflected electrons was determined.

Original languageEnglish
Pages (from-to)337-348
Number of pages12
JournalActa Physica Academiae Scientiarum Hungaricae
Volume48
Issue number4
DOIs
Publication statusPublished - Aug 1980

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backscattering
electron energy
electrons
Auger spectroscopy
excitation
electron spectroscopy
stainless steels
analyzers
isolation
graphite
amplifiers
direct current
spectrometers
energy
coefficients

ASJC Scopus subject areas

  • Nuclear and High Energy Physics

Cite this

Backscattering spectra of medium energy electrons. / Gergely, G.; Gruzza, B.; Menyhárd, M.

In: Acta Physica Academiae Scientiarum Hungaricae, Vol. 48, No. 4, 08.1980, p. 337-348.

Research output: Contribution to journalArticle

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N2 - Backscattering spectra of medium energy electrons (1-10 keV) are very important in Auger electron spectroscopy. Backscattered electrons compose the background and contribute to the excitation of Auger transitions. The N(E) backscattering spectra were determined by an Auger spectrometer with a CMA analyzer operated in DC mode using an isolation amplifier system. The N(E) backscattering spectra of electrons were studied on graphite, Si, stainless steel, Ge, Mo, W and Au in the 0.7-3 keV range. The backscattering spectra are presented. Our main results can be summarized as follows:- the backscattering coefficient rB was determined by integrating N(E) above 272 eV (effective for Auger excitation of low energy peaks); -rB is little affected by the primary energy Ep and strongly increasing with Z; - the elastic peak N(Ep) is decreasing with Ep and strongly increasing with Z; - the distribution N(E) exhibits a drastic change with Z, going from Fe to Si; - the percentage of elastically reflected electrons was determined.

AB - Backscattering spectra of medium energy electrons (1-10 keV) are very important in Auger electron spectroscopy. Backscattered electrons compose the background and contribute to the excitation of Auger transitions. The N(E) backscattering spectra were determined by an Auger spectrometer with a CMA analyzer operated in DC mode using an isolation amplifier system. The N(E) backscattering spectra of electrons were studied on graphite, Si, stainless steel, Ge, Mo, W and Au in the 0.7-3 keV range. The backscattering spectra are presented. Our main results can be summarized as follows:- the backscattering coefficient rB was determined by integrating N(E) above 272 eV (effective for Auger excitation of low energy peaks); -rB is little affected by the primary energy Ep and strongly increasing with Z; - the elastic peak N(Ep) is decreasing with Ep and strongly increasing with Z; - the distribution N(E) exhibits a drastic change with Z, going from Fe to Si; - the percentage of elastically reflected electrons was determined.

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