Automated peak interpretation in low resolution SIMS spectra; a comparison of two algorithms

W. Steiger, FG Ruedenauer, J. Antal, S. Kugler

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Low mass resolution secondary ion mass spectra from solid samples frequently exhibit multiple line interferences at integer mass numbers due to extensive clustering and molecule formation between constituent sample atoms. Two computer algorithms are described which try to address the problem of spectrum interpretation, i.e. the assignment of isotopic and molecular ion species (and their total specific ion currents) to the peaks observed in the mass spectrum. The algorithms are applied to a positive SIMS spectrum, a negative SIMS spectrum and a mass spectrum emitted from a liquid metal ion source; interpreted results are compared.

Original languageEnglish
Pages (from-to)321-327
Number of pages7
JournalVacuum
Volume33
Issue number6
DOIs
Publication statusPublished - 1983

Fingerprint

Secondary ion mass spectrometry
secondary ion mass spectrometry
mass spectra
Ions
Ion sources
liquid metals
molecular ions
Liquid metals
ion sources
ion currents
integers
Metal ions
metal ions
ions
interference
Atoms
Molecules
atoms
molecules

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Automated peak interpretation in low resolution SIMS spectra; a comparison of two algorithms. / Steiger, W.; Ruedenauer, FG; Antal, J.; Kugler, S.

In: Vacuum, Vol. 33, No. 6, 1983, p. 321-327.

Research output: Contribution to journalArticle

Steiger, W. ; Ruedenauer, FG ; Antal, J. ; Kugler, S. / Automated peak interpretation in low resolution SIMS spectra; a comparison of two algorithms. In: Vacuum. 1983 ; Vol. 33, No. 6. pp. 321-327.
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