Auger and SIMS study of segregation and corrosion behaviour of some semiconducting oxide gas-sensor materials

E. B. Várhegyi, I. V. Perczel, J. Gerblinger, M. Fleischer, H. Meixner, J. Giber

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

The influence of corrosive gases (H2, CO, NO, Cl2, SO2) on the composition of sputtered polycrystalline StTiO3, CeO2 and Ga2O3 thin films was studied. Auger electron spectroscopy (AES) and secondary ion mass spectroscopy (SIMS) were applied for studying the depth profiles of atomic composition of the thin films, treated for several hundred hours at 800 °C in diluted (20 ppm, 5%) corrosive gases. SrTiO3 was strongly attacked by Cl2 and SO2. During the Cl2 treatment the layer thickness was reduced and the structure altered near the grain boundaries. SO2 treatment caused a new surface phase formation (probably SrO). the Ga2O3 layer had a fast reaction with Cl2 giving rise to volatile Ga products but the other corrosive gases had no deteriorating effect on the layer. CeO2 proved to be the most resistant to all the gases mentioned above.

Original languageEnglish
Pages (from-to)569-572
Number of pages4
JournalSensors and Actuators, B: Chemical
Volume19
Issue number1-3
DOIs
Publication statusPublished - 1994

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Chemical sensors
Caustics
Oxides
corrosion
mass spectroscopy
Gases
Spectroscopy
Ions
Corrosion
oxides
sensors
gases
ions
Thin films
Auger electron spectroscopy
Carbon Monoxide
thin films
Chemical analysis
Auger spectroscopy
electron spectroscopy

ASJC Scopus subject areas

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

Auger and SIMS study of segregation and corrosion behaviour of some semiconducting oxide gas-sensor materials. / Várhegyi, E. B.; Perczel, I. V.; Gerblinger, J.; Fleischer, M.; Meixner, H.; Giber, J.

In: Sensors and Actuators, B: Chemical, Vol. 19, No. 1-3, 1994, p. 569-572.

Research output: Contribution to journalArticle

Várhegyi, E. B. ; Perczel, I. V. ; Gerblinger, J. ; Fleischer, M. ; Meixner, H. ; Giber, J. / Auger and SIMS study of segregation and corrosion behaviour of some semiconducting oxide gas-sensor materials. In: Sensors and Actuators, B: Chemical. 1994 ; Vol. 19, No. 1-3. pp. 569-572.
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