Atomic force microscopy on cross-sections of optical coatings: a new method

Angela Duparré, Carsten Ruppe, Kaj A. Pischow, M. Adamik, P. Barna

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Two methods are described of preparing and investigating cross-sections of single layer and multilayer optical coatings by atomic force microscopy (AFM). The first consists of mechanical grinding and polishing followed by a final ion-polishing and etching procedure. The second is simply mechanically fracturing. The results obtained from both preparation methods are compared. In addition, cross-sectional transmission electron microscopy has been used to verify the AFM results.

Original languageEnglish
Pages (from-to)70-75
Number of pages6
JournalThin Solid Films
Volume261
Issue number1-2
DOIs
Publication statusPublished - Jun 1 1995

Fingerprint

Optical coatings
optical coatings
Polishing
polishing
Atomic force microscopy
atomic force microscopy
fracturing
cross sections
grinding
Etching
Multilayers
etching
Ions
Transmission electron microscopy
preparation
transmission electron microscopy
ions

Keywords

  • Atomic force microscopy
  • Fluorine
  • Optical coatings
  • Surface morphology

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces
  • Condensed Matter Physics

Cite this

Atomic force microscopy on cross-sections of optical coatings : a new method. / Duparré, Angela; Ruppe, Carsten; Pischow, Kaj A.; Adamik, M.; Barna, P.

In: Thin Solid Films, Vol. 261, No. 1-2, 01.06.1995, p. 70-75.

Research output: Contribution to journalArticle

Duparré, Angela ; Ruppe, Carsten ; Pischow, Kaj A. ; Adamik, M. ; Barna, P. / Atomic force microscopy on cross-sections of optical coatings : a new method. In: Thin Solid Films. 1995 ; Vol. 261, No. 1-2. pp. 70-75.
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