Asymmetric intermixing in Co/Ti bilayer

P. Süle, L. Kotis, L. Tóth, M. Menyhárd, W. F. Egelhoff

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Recently we have studied the ion mixing of mass-anisotropic bilayer and found strong asymmetry depending on the succession of the layers [P. Süle, M. Menyhárd, L. Kótis, J. Lábár, W.F. Egelhoff Jr., J. Appl. Phys. 101 (2007) 043502]. The finding was explained by the mass difference of the constituents. To check the validity of explanation we studied the interface broadening of Co/Ti and Ti/Co bilayers due to low-energy ion bombardment. We have applied Auger electron spectroscopy depth profiling and molecular dynamics simulation to determine the intermixing. Since the Co/Ti system is nearly mass isotropic the ballistic intermixing mechanism can be ruled out and no asymmetry is expected. In contrary to the expectation both methods showed asymmetry of intermixing at bombardment of 2 keV ion energy. The asymmetry vanishes progressively with decreasing ion energy. We suggest that atomic size-anisotropy could play some role in the enhancement of interdiffusion of Co in Ti.

Original languageEnglish
Pages (from-to)904-910
Number of pages7
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume266
Issue number6
DOIs
Publication statusPublished - Mar 2008

Fingerprint

asymmetry
Ions
bombardment
ions
Depth profiling
Auger electron spectroscopy
Ion bombardment
Ballistics
Molecular dynamics
Anisotropy
ballistics
Auger spectroscopy
electron spectroscopy
energy
Computer simulation
molecular dynamics
anisotropy
augmentation
simulation

Keywords

  • AES depth profiling
  • Ion-beam induced mixing
  • MD simulation

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Asymmetric intermixing in Co/Ti bilayer. / Süle, P.; Kotis, L.; Tóth, L.; Menyhárd, M.; Egelhoff, W. F.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 266, No. 6, 03.2008, p. 904-910.

Research output: Contribution to journalArticle

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