As-grown microtopologies of modified-Lely SiC(0001) terraced vicinal surfaces

T. Marek, J. Heindl, H. P. Strunk, R. Eckstein, St G. Mueller, D. Hofmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Risers and treads on terraced surfaces of modified-Lely (M-Lely) grown 6H-SiC(0001) bulk crystals are investigated by reflection electron microscopy (REM). On risers we find parallel steps, with a height of one or two unit cells. On treads we find in addition to growth spirals island formation. We take these observations to conclude that two competitive processes operate in parallel, the step-flow mode and the two-dimensional nucleation.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsR.C. Cammarata, E.H. Chason, T.L. Einstein, E.D. Williams
PublisherMRS
Pages145-150
Number of pages6
Volume440
Publication statusPublished - 1997
EventProceedings of the 1996 MRS Fall Symposium - Boston, MA, USA
Duration: Dec 2 1996Dec 5 1996

Other

OtherProceedings of the 1996 MRS Fall Symposium
CityBoston, MA, USA
Period12/2/9612/5/96

Fingerprint

Electron microscopy
Nucleation
Crystals

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Marek, T., Heindl, J., Strunk, H. P., Eckstein, R., Mueller, S. G., & Hofmann, D. (1997). As-grown microtopologies of modified-Lely SiC(0001) terraced vicinal surfaces. In R. C. Cammarata, E. H. Chason, T. L. Einstein, & E. D. Williams (Eds.), Materials Research Society Symposium - Proceedings (Vol. 440, pp. 145-150). MRS.

As-grown microtopologies of modified-Lely SiC(0001) terraced vicinal surfaces. / Marek, T.; Heindl, J.; Strunk, H. P.; Eckstein, R.; Mueller, St G.; Hofmann, D.

Materials Research Society Symposium - Proceedings. ed. / R.C. Cammarata; E.H. Chason; T.L. Einstein; E.D. Williams. Vol. 440 MRS, 1997. p. 145-150.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Marek, T, Heindl, J, Strunk, HP, Eckstein, R, Mueller, SG & Hofmann, D 1997, As-grown microtopologies of modified-Lely SiC(0001) terraced vicinal surfaces. in RC Cammarata, EH Chason, TL Einstein & ED Williams (eds), Materials Research Society Symposium - Proceedings. vol. 440, MRS, pp. 145-150, Proceedings of the 1996 MRS Fall Symposium, Boston, MA, USA, 12/2/96.
Marek T, Heindl J, Strunk HP, Eckstein R, Mueller SG, Hofmann D. As-grown microtopologies of modified-Lely SiC(0001) terraced vicinal surfaces. In Cammarata RC, Chason EH, Einstein TL, Williams ED, editors, Materials Research Society Symposium - Proceedings. Vol. 440. MRS. 1997. p. 145-150
Marek, T. ; Heindl, J. ; Strunk, H. P. ; Eckstein, R. ; Mueller, St G. ; Hofmann, D. / As-grown microtopologies of modified-Lely SiC(0001) terraced vicinal surfaces. Materials Research Society Symposium - Proceedings. editor / R.C. Cammarata ; E.H. Chason ; T.L. Einstein ; E.D. Williams. Vol. 440 MRS, 1997. pp. 145-150
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