Ar+ laser-induced forward transfer (LIFT): a novel method for micrometer-size surface patterning

Research output: Contribution to journalArticle

60 Citations (Scopus)

Abstract

As a result of a systematic study on laser-induced forward transfer of tungsten (W) thin films by a focused Ar+ laser (λ=514 nm, 2w0=3μm), it is shown that deposition of 2-3μm diameter W spots of 100 nm thickness and 100% coverage is attainable at low processing powers (50-100 mW).

Original languageEnglish
Pages (from-to)317-320
Number of pages4
JournalApplied Surface Science
Volume69
Issue number1-4
DOIs
Publication statusPublished - May 2 1993

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint Dive into the research topics of 'Ar<sup>+</sup> laser-induced forward transfer (LIFT): a novel method for micrometer-size surface patterning'. Together they form a unique fingerprint.

  • Cite this