Applications of non-diffracting beams

Zsolt Bor, Miklos Erdelyi, Zoltan Horvath, Gabor Szabo, Karoly Osvay, William L. Wilson, Frank K. Tittel

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

A commercially available simulation software, Prolith/2, was used to evaluate the aerial image of contact hole arrays and line-space patterns with different pitch sizes. The resolution enhanced by 25%, while the filter shifted the optimum focal position by 5 microns towards the lens. Due to constructive interference between the diffraction rings, secondary maxima appeared between the main peaks. These peaks can be eliminated by means of controlling the spatial coherence the adjacent holes. The filter with a narrow bandwidth introduces a pitch sensitivity and light loss into the system. A pattern can be imaged if the filter transmits the cardinal spatial Fourier components of the mask patterns.

Original languageEnglish
Pages (from-to)76-77
Number of pages2
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3749
Publication statusPublished - Jan 1 1999
EventProceedings of the 1999 18th Congress of the International Commission for Optics (ICO XVIII): Optics for the Next Millennium - San Francisco, CA, USA
Duration: Aug 2 1999Aug 6 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Bor, Z., Erdelyi, M., Horvath, Z., Szabo, G., Osvay, K., Wilson, W. L., & Tittel, F. K. (1999). Applications of non-diffracting beams. Proceedings of SPIE - The International Society for Optical Engineering, 3749, 76-77.