In the ATOMKI ECRIS Laboratory long-term projects were initiated to investigate basic properties of high charged ions and use heavy ion beams and plasmas for materials research, including the nanotechnology as well as to explore the possibility of industrial or medical applications of such ion treatments. In this paper a brief review of some new experimental possibilities and applications is presented. The ECR ion source was further developed towards irradiation of solid surfaces with highly charged ions or even fullerenes. Experiments on interaction of such plasma with titanium surface were performed with an aim of its biofunctionalization. The modification of functional amorphous chalcogenide layer surfaces by highly charged argon and xenon ions was also investigated with aim to establish basic mechanism of such processes and to develop new possibilities of nanofabrication.
|Number of pages||4|
|Journal||Journal of Electrical and Electronics Engineering|
|Publication status||Published - Dec 1 2009|
- High charged ion
- Surface modofiation
ASJC Scopus subject areas
- Electrical and Electronic Engineering