APPLICATION OF SIMS ANALYSIS WITH REACTIVE SPUTTERING AND CONCLUSIONS TO THE MECHANISM OF THE SECONDARY IONIZATION.

J. Giber, K. Josepovits

Research output: Chapter in Book/Report/Conference proceedingChapter

4 Citations (Scopus)

Abstract

Detailed results of systematic investigations and practical advantages of reactive SIMS are presented. The decreasing of concentration dependence of ionization coefficient by this method gives a possibility for the determination of concentration in a broad interval, provided an etalon wafer of known concentration being available. By a comparison of the results got by reactive and pure argon sputtering a conclusion on the oxidation state of the system can be made. Using this method the enrichment of contaminations on interfaces can be detected.

Original languageEnglish
Title of host publicationUnknown Host Publication Title
PublisherInt Union for Vac Sci, Tech and Appl
Pages2585-2588
Number of pages4
Volume3
Publication statusPublished - 1977
EventProc of the Int Vac Congr, 7th, and the Int Conf on Solid Surf, 3rd, of the Int Union for Vac Sci, Tech and Appl - Vienna, Austria
Duration: Sep 12 1977Sep 16 1977

Other

OtherProc of the Int Vac Congr, 7th, and the Int Conf on Solid Surf, 3rd, of the Int Union for Vac Sci, Tech and Appl
CityVienna, Austria
Period9/12/779/16/77

Fingerprint

Reactive sputtering
Secondary ion mass spectrometry
Ionization
Sputtering
Argon
Contamination
Oxidation

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Giber, J., & Josepovits, K. (1977). APPLICATION OF SIMS ANALYSIS WITH REACTIVE SPUTTERING AND CONCLUSIONS TO THE MECHANISM OF THE SECONDARY IONIZATION. In Unknown Host Publication Title (Vol. 3, pp. 2585-2588). Int Union for Vac Sci, Tech and Appl.

APPLICATION OF SIMS ANALYSIS WITH REACTIVE SPUTTERING AND CONCLUSIONS TO THE MECHANISM OF THE SECONDARY IONIZATION. / Giber, J.; Josepovits, K.

Unknown Host Publication Title. Vol. 3 Int Union for Vac Sci, Tech and Appl, 1977. p. 2585-2588.

Research output: Chapter in Book/Report/Conference proceedingChapter

Giber, J & Josepovits, K 1977, APPLICATION OF SIMS ANALYSIS WITH REACTIVE SPUTTERING AND CONCLUSIONS TO THE MECHANISM OF THE SECONDARY IONIZATION. in Unknown Host Publication Title. vol. 3, Int Union for Vac Sci, Tech and Appl, pp. 2585-2588, Proc of the Int Vac Congr, 7th, and the Int Conf on Solid Surf, 3rd, of the Int Union for Vac Sci, Tech and Appl, Vienna, Austria, 9/12/77.
Giber J, Josepovits K. APPLICATION OF SIMS ANALYSIS WITH REACTIVE SPUTTERING AND CONCLUSIONS TO THE MECHANISM OF THE SECONDARY IONIZATION. In Unknown Host Publication Title. Vol. 3. Int Union for Vac Sci, Tech and Appl. 1977. p. 2585-2588
Giber, J. ; Josepovits, K. / APPLICATION OF SIMS ANALYSIS WITH REACTIVE SPUTTERING AND CONCLUSIONS TO THE MECHANISM OF THE SECONDARY IONIZATION. Unknown Host Publication Title. Vol. 3 Int Union for Vac Sci, Tech and Appl, 1977. pp. 2585-2588
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