In the present work slightly oxidised porous silicon samples of columnar type were investigated by resonant elastic scattering using the 3045 keV resonance in the 16O(α, α)16O reaction. If the incident energy is slightly above the resonance energy, a characteristic peak appears in the energy spectra of the backscattered particles. In porous material the individual ions travel fluctuating distance in pores, hence, the peak width depends on the structure of the sample. When changing the direction of the analysing beam to the sample, the width of the resonance peak changes in a special way characterizing the angular distribution of the pore walls. This resonance method was applied to columnar type porous Si samples implanted by 4 MeV N ions at various tilt angles and fluences. It was shown that the beam tilts the pore walls by an angle proportional to the fluence and the sine of the angle between the beam and the pore walls. Meantime, the angular divergence of the pore walls also increases. The underlying mechanism is briefly discussed.
|Number of pages||6|
|Journal||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|Publication status||Published - Mar 2000|
|Event||The 14th International Conference on Ion Beam Analysis - 6th European Conference on Accelerators in Applied Research and Technology - Dresden, Ger|
Duration: Jul 26 1999 → Jul 30 1999
ASJC Scopus subject areas
- Nuclear and High Energy Physics