Application of grazing exit angle in RBS microprobe measurements

A. Simon, F. Pászti, I. Uzonyi, A. Manuaba, A. Kiss

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Alpha backscattering measurements have been used successfully at the Debrecen nuclear microprobe facility for material analysis. Some of the examples are presented here in detail. Contrary to the traditional RBS technique the scanning RBS microprobe with the detector at grazing exit angle is capable of studying surface topography. This effect is demonstrated by RBS mapping images taken with 2.0 and 2.5 MeV 4He+ beams on test samples of different surface patterns containing only one element, Si. The observed effects are discussed.

Original languageEnglish
Pages (from-to)350-356
Number of pages7
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume136-138
Publication statusPublished - Mar 1998

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grazing
Surface topography
Backscattering
Detectors
Scanning
backscattering
topography
scanning
detectors

Keywords

  • Grazing exit angle
  • RBS
  • Scanning nuclear microprobe
  • Silicon microstructure
  • Surface topography

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

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AU - Pászti, F.

AU - Uzonyi, I.

AU - Manuaba, A.

AU - Kiss, A.

PY - 1998/3

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AB - Alpha backscattering measurements have been used successfully at the Debrecen nuclear microprobe facility for material analysis. Some of the examples are presented here in detail. Contrary to the traditional RBS technique the scanning RBS microprobe with the detector at grazing exit angle is capable of studying surface topography. This effect is demonstrated by RBS mapping images taken with 2.0 and 2.5 MeV 4He+ beams on test samples of different surface patterns containing only one element, Si. The observed effects are discussed.

KW - Grazing exit angle

KW - RBS

KW - Scanning nuclear microprobe

KW - Silicon microstructure

KW - Surface topography

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