Analysis of thickness profiles of pulsed laser deposited metal films

Zoltán Kántor, T. Szörényi, Z. Tóth, Alíz Simon, László Gombos

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Practically all theoretical approaches to pulsed laser deposition start on a condition which is extremely hard to realize in practice: that the target surface is smooth and plane. When using liquid (molten) targets, the problem of surface deterioration upon repetitive ablation can completely be solved, allowing for fair comparison of experiment and theory. In this paper measured thickness profiles of metal films deposited in vacuum from molten In, Sn, Bi and Sn-Bi alloy targets are compared with calculated distribution functions. The strictly symmetrical thickness profiles of tin and indium films, derived from two-dimensional optical density maps and Rutherford backscattering data are analysed in terms of Lorentzian-like functions, originating from the so-called shifted Maxwellian velocity distribution. The bismuth profiles show a characteristic deviation from this shape.

Original languageEnglish
Pages (from-to)599-604
Number of pages6
JournalApplied Surface Science
Volume138-139
Issue number1-4
Publication statusPublished - Jan 1999

Fingerprint

Pulsed lasers
metal films
Molten materials
pulsed lasers
Metals
Bismuth
Indium
Density (optical)
Tin
Rutherford backscattering spectroscopy
Pulsed laser deposition
profiles
Ablation
Velocity distribution
Distribution functions
Deterioration
optical density
Vacuum
deterioration
bismuth

Keywords

  • Laser beam applications
  • PLD
  • Pulsed laser deposition
  • Thin film deposition

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Analysis of thickness profiles of pulsed laser deposited metal films. / Kántor, Zoltán; Szörényi, T.; Tóth, Z.; Simon, Alíz; Gombos, László.

In: Applied Surface Science, Vol. 138-139, No. 1-4, 01.1999, p. 599-604.

Research output: Contribution to journalArticle

Kántor, Z, Szörényi, T, Tóth, Z, Simon, A & Gombos, L 1999, 'Analysis of thickness profiles of pulsed laser deposited metal films', Applied Surface Science, vol. 138-139, no. 1-4, pp. 599-604.
Kántor, Zoltán ; Szörényi, T. ; Tóth, Z. ; Simon, Alíz ; Gombos, László. / Analysis of thickness profiles of pulsed laser deposited metal films. In: Applied Surface Science. 1999 ; Vol. 138-139, No. 1-4. pp. 599-604.
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