An X-ray diffraction study of the structural properties of thick relaxed (100) InGaAs/GaAs heterostructures

F. Riesz, J. Z. Domagala, Á Nemcsics

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Structural properties of highly mismatched InGaAs/GaAs (100) heterostructures grown by molecular beam epitaxy are studied using high-resolution X-ray diffraction. The layers are nearly fully relaxed and show closely tetragonal distortion as shown by asymmetric reflections. However, structural defects show an asymmetry of the orthogonal 〈110〉 directions as revealed by reciprocal space maps. Substrate miscut effects are accounted for this difference.

Original languageEnglish
Title of host publicationPhysica Status Solidi C: Conferences
Pages1298-1303
Number of pages6
Volume2
Edition4
DOIs
Publication statusPublished - 2005

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molecular beam epitaxy
asymmetry
high resolution
defects
diffraction
x rays

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Riesz, F., Domagala, J. Z., & Nemcsics, Á. (2005). An X-ray diffraction study of the structural properties of thick relaxed (100) InGaAs/GaAs heterostructures. In Physica Status Solidi C: Conferences (4 ed., Vol. 2, pp. 1298-1303) https://doi.org/10.1002/pssc.200460441

An X-ray diffraction study of the structural properties of thick relaxed (100) InGaAs/GaAs heterostructures. / Riesz, F.; Domagala, J. Z.; Nemcsics, Á.

Physica Status Solidi C: Conferences. Vol. 2 4. ed. 2005. p. 1298-1303.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Riesz, F, Domagala, JZ & Nemcsics, Á 2005, An X-ray diffraction study of the structural properties of thick relaxed (100) InGaAs/GaAs heterostructures. in Physica Status Solidi C: Conferences. 4 edn, vol. 2, pp. 1298-1303. https://doi.org/10.1002/pssc.200460441
Riesz F, Domagala JZ, Nemcsics Á. An X-ray diffraction study of the structural properties of thick relaxed (100) InGaAs/GaAs heterostructures. In Physica Status Solidi C: Conferences. 4 ed. Vol. 2. 2005. p. 1298-1303 https://doi.org/10.1002/pssc.200460441
Riesz, F. ; Domagala, J. Z. ; Nemcsics, Á. / An X-ray diffraction study of the structural properties of thick relaxed (100) InGaAs/GaAs heterostructures. Physica Status Solidi C: Conferences. Vol. 2 4. ed. 2005. pp. 1298-1303
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