Algorithmic solutions for thermal and electro-static simulation of MEMS

Research output: Contribution to journalConference article

Abstract

This paper is dealing with the field simulation problems of MEMS structures. Both thermal and electro-static fields are considered. Two simulation algorithms are investigated in details: the Fourier transformation method applied to multi-layer structures and the successive node reduction algorithm belonging to the family of FDM methods. Extensions of these methods are discussed, e.g. the application of the Fourier method to mixed lateral boundary conditions and methods for physical level/network model level co-simulation.

Original languageEnglish
Pages (from-to)159-173
Number of pages15
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4945
DOIs
Publication statusPublished - Dec 1 2002
EventMEMS/MOEMS:Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly - Brugge, Belgium
Duration: Oct 28 2002Oct 29 2002

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Keywords

  • Electro-static simulation
  • Physical/network co-simulation
  • Simulation of MEMS
  • Thermal simulation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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