Algorithmic and modeling aspects in the electro-thermal simulation of thermally operated microsystems

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A new algorithm has been developed for the layout based electro-thermal simulation of integrated circuits and MEMS, using simultaneous iteration. The general advantage of this method over simulator coupling is that, it is also suitable to cope with very fast changes. The usual drawback is however, that the thermal nodes have to be added to the nodes of the electrical network, rendering usually huge networks to be simulated. In our thermal modeling method the thermal system is represented by a matrix of Foster networks. The solution of these can be partly pre-calculated, partly separated from the solution of the electrical nodes, resulting in fast and accurate electro-thermal simulation. In the paper we present a case study, in which the electro-thermal simulation results of a realized MEMS electro-thermal converter show good match with the measured results.

Original languageEnglish
Title of host publication2003 Nanotechnology Conference and Trade Show - Nanotech 2003
EditorsM. Laudon, B. Romanowicz
Pages476-479
Number of pages4
Publication statusPublished - Dec 1 2003
Event2003 Nanotechnology Conference and Trade Show - Nanotech 2003 - San Francisco, CA, United States
Duration: Feb 23 2003Feb 27 2003

Publication series

Name2003 Nanotechnology Conference and Trade Show - Nanotech 2003
Volume2

Other

Other2003 Nanotechnology Conference and Trade Show - Nanotech 2003
CountryUnited States
CitySan Francisco, CA
Period2/23/032/27/03

Keywords

  • Compact thermal modeling
  • Electro-thermal simulation
  • MEMS simulation

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Rencz, M., Székely, V., Poppe, A., & Courtois, B. (2003). Algorithmic and modeling aspects in the electro-thermal simulation of thermally operated microsystems. In M. Laudon, & B. Romanowicz (Eds.), 2003 Nanotechnology Conference and Trade Show - Nanotech 2003 (pp. 476-479). (2003 Nanotechnology Conference and Trade Show - Nanotech 2003; Vol. 2).