AES investigation of inhomogenous metal-insulator samples

Gábor Dobos, György Vida, Zoltán Tóth, Katalin Josepovits

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this article, the secondary electron-emission properties of both vertically and laterally inhomogeneous samples are discussed. To study the effect of surface coverage, the total electron-emission yield of tungsten and niobium samples was measured as a function of primary electron energy and oxide thickness. A method is suggested to avoid charging difficulties during AES measurements of samples that consist of both metal and various insulator parts.

Original languageEnglish
Pages (from-to)567-571
Number of pages5
JournalMicroscopy and Microanalysis
Volume11
Issue number6
DOIs
Publication statusPublished - Dec 1 2005

Keywords

  • AES
  • Charging
  • Inhomogeneity
  • Niobium
  • Secondary electron emission
  • Tungsten

ASJC Scopus subject areas

  • Instrumentation

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