Absolute determination of 1012 cm-2 as in Si by RBS microanalysis

F. Abel, B. Agius, J. Gyulai

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Optimization of experimental conditions in the Rutherford backscattering spectrometry technique has been effected in order to determine very low quantities of arsenic implanted in silicon. Using 2 MeV Ne+ beam and an anti-halo detecting assembly, we could measure amounts down to 1012 As/cm2.

Original languageEnglish
Pages (from-to)77-78
Number of pages2
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume21
Issue number1-4
DOIs
Publication statusPublished - 1987

Fingerprint

Rutherford backscattering spectroscopy
Microanalysis
Arsenic
Silicon
microanalysis
arsenic
Spectrometry
halos
backscattering
assembly
optimization
silicon
spectroscopy

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

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title = "Absolute determination of 1012 cm-2 as in Si by RBS microanalysis",
abstract = "Optimization of experimental conditions in the Rutherford backscattering spectrometry technique has been effected in order to determine very low quantities of arsenic implanted in silicon. Using 2 MeV Ne+ beam and an anti-halo detecting assembly, we could measure amounts down to 1012 As/cm2.",
author = "F. Abel and B. Agius and J. Gyulai",
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AU - Abel, F.

AU - Agius, B.

AU - Gyulai, J.

PY - 1987

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N2 - Optimization of experimental conditions in the Rutherford backscattering spectrometry technique has been effected in order to determine very low quantities of arsenic implanted in silicon. Using 2 MeV Ne+ beam and an anti-halo detecting assembly, we could measure amounts down to 1012 As/cm2.

AB - Optimization of experimental conditions in the Rutherford backscattering spectrometry technique has been effected in order to determine very low quantities of arsenic implanted in silicon. Using 2 MeV Ne+ beam and an anti-halo detecting assembly, we could measure amounts down to 1012 As/cm2.

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JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

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