A technique for the production of a thin film with a linearly varying composition

M. Nastasi, J. C. Barbour, J. Gyulai, L. S. Hung, J. W. Mayer

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

A technique is described for the fabrication of a single thin film sample with a controlled variation in composition. Vacuum evaporation through a thickness controlling aperture (in the shape of an Archimedes spiral) onto a rotating substrate yields a sample with alternating wedge-shaped films in which the composition varies linearly with distance. The composition gradient of these samples spans the entire range of a phase diagram thereby allowing thermal annealing and ion irradiation studies as a function of position (composition) on the film. Rutherford backscattering is used to investigate the films while on the NaCl substrate, and energy dispersive spectroscopy and electron diffraction are used to study the self-supporting films on transmission electron microscope grids after dissolution of the substrate.

Original languageEnglish
Pages (from-to)1903-1906
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume3
Issue number5
DOIs
Publication statusPublished - 1985

Fingerprint

Thin films
thin films
Chemical analysis
Substrates
Vacuum evaporation
Rutherford backscattering spectroscopy
Ion bombardment
ion irradiation
Electron diffraction
wedges
Phase diagrams
Energy dispersive spectroscopy
backscattering
dissolving
Dissolution
Electron microscopes
electron diffraction
electron microscopes
apertures
grids

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

A technique for the production of a thin film with a linearly varying composition. / Nastasi, M.; Barbour, J. C.; Gyulai, J.; Hung, L. S.; Mayer, J. W.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 3, No. 5, 1985, p. 1903-1906.

Research output: Contribution to journalArticle

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