Measuring the thermal resistance of thermal interface materials is an increasingly difficult task. The values to be measured are becoming smaller and smaller as a result of the huge efforts in material science to develop better thermal interface material in order to cope with the growing challenges of thermal management. In this paper we present the concept and some first results of a new TIM tester. The tester is using steady state measurement principle. With the help of dedicated test dies that are used to measure temperature, heat flux and parallelism at the same time, Rth values in the range of as low as 0.01 K/W can be measured with better than 5 % accuracy.