A small universal quadrupole mass spectrometer

I. Berecz, S. Bohátka, J. Gál, L. Kiss, G. Langer, A. Paál, RM Kovács

Research output: Contribution to journalArticle

Abstract

A universal quadrupole mass spectrometer (type Q60U) has been constructed for general laboratory and industrial purposes. Its 10 cm long analyser rod system, 1-60 amu mass range and 4·10-4 A mbar-1 sensitivity make it a good residual gas analyser. Due to its high mass resolution it can be used also as an analytical instrument. It works as a total pressure gauge, too, saving the cost of a vacuum gauge. The bias and gain controls and audio-frequency signal generator of its leak detection unit complete the quadrupole as a sensitive multi-test gas leak detector.

Original languageEnglish
Pages (from-to)69-70
Number of pages2
JournalVacuum
Volume33
Issue number1-2
DOIs
Publication statusPublished - Jan 1 1983

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ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

Cite this

Berecz, I., Bohátka, S., Gál, J., Kiss, L., Langer, G., Paál, A., & Kovács, RM. (1983). A small universal quadrupole mass spectrometer. Vacuum, 33(1-2), 69-70. https://doi.org/10.1016/0042-207X(83)90532-8