A simple humidity sensor with thin film porous alumina and integrated heating

László Juhász, J. Mizsei

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)

Abstract

We developed a simple, capacitive, AAO (Anodic Aluminum Oxide) based humidity sensor structure with integrated heating and temperature measuring capabilities. The sensor was prepared by conventional semiconductor processing steps and an additional electrochemical oxidation of a deposited thin film aluminum layer. The achieved average sensitivity (approx. 2.5 pF/RH%) was one magnitude higher than the commercially available discrete capacitive sensors'. With a p-n junction below the capacitive structure we were able to heat the chip to the desired temperature. At the same time the temperature was calculated form the measured forward voltage using calibration data. The integrated heating enabled the study of the sensing mechanism at different sensor temperatures and was also useful for eliminating the drift ("reset the sensor") caused by measurements at high humidity and several days of storage at room-conditions.

Original languageEnglish
Title of host publicationProcedia Engineering
Pages701-704
Number of pages4
Volume5
DOIs
Publication statusPublished - 2010
Event24th Eurosensors Conference - Linz, Austria
Duration: Sep 5 2010Sep 8 2010

Other

Other24th Eurosensors Conference
CountryAustria
CityLinz
Period9/5/109/8/10

Fingerprint

Humidity sensors
Alumina
Heating
Thin films
Aluminum
Capacitive sensors
Electrochemical oxidation
Sensors
Temperature sensors
Temperature
Atmospheric humidity
Calibration
Semiconductor materials
Oxides
Electric potential
Processing

Keywords

  • Humidity sensor
  • Integrated heating
  • Porous alumina

ASJC Scopus subject areas

  • Engineering(all)

Cite this

A simple humidity sensor with thin film porous alumina and integrated heating. / Juhász, László; Mizsei, J.

Procedia Engineering. Vol. 5 2010. p. 701-704.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Juhász, L & Mizsei, J 2010, A simple humidity sensor with thin film porous alumina and integrated heating. in Procedia Engineering. vol. 5, pp. 701-704, 24th Eurosensors Conference, Linz, Austria, 9/5/10. https://doi.org/10.1016/j.proeng.2010.09.206
Juhász, László ; Mizsei, J. / A simple humidity sensor with thin film porous alumina and integrated heating. Procedia Engineering. Vol. 5 2010. pp. 701-704
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